Abstract:
Samples of thick (about 30 μm) films of undoped zinc oxide on sapphire prepared by magnetron sputtering using an uncooled target have been investigated. The structural and luminescence properties of the initial films and films subjected to additional recrystallization annealing in air have been studied. The time and temperature-dependent characteristics of the samples are considered. It is shown that annealing in air enhances the structural, optical, and luminescence properties of these films.
Keywords:
ZnO thick films, magnetron sputtering method, ZnO green luminescence, temperature dependence of X-ray luminescence, electron microscopy, uncooled target.
This study was supported by the Ministry of Science and Higher Education of the Russian Federation within a state order to the Federal Scientific Research Center Crystallography and Photonics of the Russian Academy of Sciences in the part concerning the film preparation and the Russian Foundation for Basic Research, projects nos. 18-29-12099 mk (in the part concerning the structural diagnostics and microscopy of epitaxial films) and 18-52-76002 ERA_a (in the part concerning the investigation of luminescence and scintillation characteristics of epitaxial films).
Citation:
I. D. Venevtsev, P. A. Rodnyi, A. È. Muslimov, V. M. Kanevskii, V. A. Babaev, A. M. Ismailov, “X-ray luminescence of zinc oxide thick films”, Optics and Spectroscopy, 127:6 (2019), 981–985; Optics and Spectroscopy, 127:6 (2019), 1075–1079
This publication is cited in the following 2 articles:
Andrey P. Tarasov, Abubakar M. Ismailov, Makhach Kh. Gadzhiev, Ivan D. Venevtsev, Arsen E. Muslimov, Ivan S. Volchkov, Samira R. Aidamirova, Alexandr S. Tyuftyaev, Andrey V. Butashin, Vladimir M. Kanevsky, “Effect of Plasma Treatment on the Luminescent and Scintillation Properties of Thick ZnO Films Fabricated by Sputtering of a Hot Ceramic Target”, Photonics, 10:12 (2023), 1354
A. E. Muslimov, V. M. Kanevsky, I. D. Venevtsev, A. M. Ismailov, “Optical Properties of Thick Zinc Oxide Films Doped with Gallium and Gold”, Crystallogr. Rep., 65:5 (2020), 766