|
This article is cited in 3 scientific papers (total in 3 papers)
Optics of surfaces and interfaces
Invariants of the reflection coefficient
L. A. Fedyukhina, A. V. Gorchakovb, E. A. Kolosovskiia a Rzhanov Institute of Semiconductor Physics, Siberian Branch of Russian Academy of Sciences, Novosibirsk
b Novosibirsk State University
Abstract:
A detailed analysis of the reflection coefficient of linearly polarized in plane of incidence of a plane monochromatic wave from a three-layer structure is carried out. Solved the reverse problem ellipsometry for a three-layer structure. The existence of two reflection factor invariants for the flat-parallel plate is shown. A set of three observable parameters not previously used is proposed, which allows to restore the material parameters of the layer. Analytical expressions are obtained both for the reflection coefficient and incidence angles for a number of important particular cases, and for the direct calculation of the dielectric constant and layer thickness from the measured values of the observed parameters.
Keywords:
Invariants of the reflection coefficient, reverse problem ellipsometry, Brewster angle, thin films.
Received: 21.06.2019 Revised: 24.10.2019 Accepted: 01.11.2019
Citation:
L. A. Fedyukhin, A. V. Gorchakov, E. A. Kolosovskii, “Invariants of the reflection coefficient”, Optics and Spectroscopy, 128:2 (2020), 266–271; Optics and Spectroscopy, 128:2 (2020), 257–263
Linking options:
https://www.mathnet.ru/eng/os481 https://www.mathnet.ru/eng/os/v128/i2/p266
|
Statistics & downloads: |
Abstract page: | 40 | Full-text PDF : | 9 |
|