Experimental studies of various polymer compositions for creating relief-phase diffraction gratings for augmented reality systems

The possibility of replication of high-frequency diffraction gratings obtained in a photoresist layer to glass substrates using polymer compositions (OKM and Technovit) is shown and their comparative analysis is carried out. The replication mechanism of the relief-phase structure is based on a two-stage process, which consists in obtaining a nickel master element, followed by applying a polymer composition to it and curing it under the influence of UV radiation. The replicating regimes were optimized (time, exposure, thickness of the polymer base), which made it possible to obtain relief phase diffraction gratings with a depth of surface relief comparable with the initial structure obtained in the photoresist layer. The diffraction efficiency of the resulting gratings was estimated, as well as the change in the depth of the surface relief of polymer copies obtained from one master element.