Optics and Spectroscopy
RUS  ENG    JOURNALS   PEOPLE   ORGANISATIONS   CONFERENCES   SEMINARS   VIDEO LIBRARY   PACKAGE AMSBIB  
General information
Latest issue
Archive

Search papers
Search references

RSS
Latest issue
Current issues
Archive issues
What is RSS



Optics and Spectroscopy:
Year:
Volume:
Issue:
Page:
Find






Personal entry:
Login:
Password:
Save password
Enter
Forgotten password?
Register


Optics and Spectroscopy, 2021, Volume 129, Issue 3, Pages 266–271
DOI: https://doi.org/10.21883/OS.2021.03.50652.282-20
(Mi os169)
 

This article is cited in 10 scientific papers (total in 10 papers)

Spectroscopy and physics of atoms and molecules

Emission spectra of heavy inert gases Kr, Xe in the range 3–20 nm under pulsed laser excitation using various gas jets as targets

A. N. Nechai, A. A. Perekalov, N. N. Salashchenko, N. I. Chkhalo

Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod
Abstract: The article considers the results of studies of the emission spectra of Kr, Xe upon excitation by pulsed laser radiation. We used Nd: YAG laser, λλ = 1064 nm, ττ = 5 ns, and EpulseEpulse = 0.8 J. The spectral range of 30–200A was studied. We used capillary with dd = 500 μμm and supersonic conical nozzles with dcrdcr = 145 μμm, 2αα = 12, LL = 5 mm, and dcrdcr = 540 μμm, 2αα = 11, LL = 5 mm to form a gas jet. The emission spectra for various gas targets were obtained, the obtained spectra were deciphered, and the ions emitting in this spectral range were determined. We observed that with increasing particle concentration in the zone of laser spark, the radiation intensity increases. In this case, the intensity of ion lines with high degrees of ionization increases faster.
Keywords: cluster beams, extreme ultraviolet radiation, emission spectra, laser spark, x-ray spectrometer-monochromator.
Funding agency Grant number
Russian Foundation for Basic Research 19-02-00081
19-07-00173
20-02-00708
20-02-00364
This research was supported by the Russian Foundation for Basic Research, projects nos. 19-02-00081, 19-07-00173, 20-02-00708, and 20-02-00364.
Received: 19.11.2020
Revised: 19.11.2020
Accepted: 30.11.2020
English version:
Optics and Spectroscopy, 2021, Volume 129, Issue 3, Pages 363–368
DOI: https://doi.org/10.1134/S0030400X21030127
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. N. Nechai, A. A. Perekalov, N. N. Salashchenko, N. I. Chkhalo, “Emission spectra of heavy inert gases Kr, Xe in the range 3–20 nm under pulsed laser excitation using various gas jets as targets”, Optics and Spectroscopy, 129:3 (2021), 266–271; Optics and Spectroscopy, 129:3 (2021), 363–368
Citation in format AMSBIB
\Bibitem{NecPerSal21}
\by A.~N.~Nechai, A.~A.~Perekalov, N.~N.~Salashchenko, N.~I.~Chkhalo
\paper Emission spectra of heavy inert gases Kr, Xe in the range 3--20 nm under pulsed laser excitation using various gas jets as targets
\jour Optics and Spectroscopy
\yr 2021
\vol 129
\issue 3
\pages 266--271
\mathnet{http://mi.mathnet.ru/os169}
\crossref{https://doi.org/10.21883/OS.2021.03.50652.282-20}
\elib{https://elibrary.ru/item.asp?id=46486221}
\transl
\jour Optics and Spectroscopy
\yr 2021
\vol 129
\issue 3
\pages 363--368
\crossref{https://doi.org/10.1134/S0030400X21030127}
Linking options:
  • https://www.mathnet.ru/eng/os169
  • https://www.mathnet.ru/eng/os/v129/i3/p266
  • This publication is cited in the following 10 articles:
    1. I.S. Abramov, S.V. Golubev, E.D. Gospodchikov, A.G. Shalashov, A.A. Perekalov, A.N. Nechay, N.I. Chkhalo, “Laser discharge in a high-pressure jet of heavy noble gas: Expansion of emitting volume promises an efficient source of EUV light for lithography”, Phys. Rev. Applied, 23:2 (2025)  crossref
    2. M. S. Mikhailenko, A. E. Pestov, A. K. Chernyshev, N. I. Chkhalo, “Investigation of the Angular Dependences of the Velocities of Ion-Beam Sputtering of Metals for the Synthesis of Mask Blanks”, Tech. Phys., 69:5 (2024), 1279  crossref
    3. M. S. Mikhailenko, A. E. Pestov, A. K. Chernyshev, N. I. Chkhalo, “Investigation of the Angular Dependences of the Velocities of Ion-Beam Sputtering of Metals for the Synthesis of Mask Blanks”, Tech. Phys., 69:6 (2024), 1683  crossref
    4. S. Yu. Zuev, A. Ya. Lopatin, V. I. Luchin, N. N. Salashchenko, N. N. Tsybin, N. I. Chkhalo, “Protective Freely Hanging Films for Projection Lithography Installations in the Extreme UV Range”, Mikroelektronika, 52:5 (2023), 354  crossref
    5. V. E. Guseva, A. N. Nechay, A. A. Perekalov, N. N. Salashchenko, N. I. Chkhalo, “Emission Spectra of Molecular Gases CHF3, CCl2F2, SF6 in the Range 3–20 nm under Pulsed Laser Excitation Using Various Gas Jets as Targets”, Opt. Spectrosc., 131:6 (2023), 391  crossref
    6. S. Yu. Zuev, A. Ya. Lopatin, V. I. Luchin, N. N. Salashchenko, N. N. Tsybin, N. I. Chkhalo, “Protective Free-Standing Films for Projection Lithography Installations in the Extreme UV Range”, Russ Microelectron, 52:5 (2023), 344  crossref
    7. V. E. Guseva, A. N. Nechay, A. A. Perekalov, N. N. Salashchenko, N. I. Chkhalo, “Emission Spectra of Liquid-Jet Targets of Hexane C6H14, Dichloromethane CH2Cl2, Methylene Bromide CH3Br in the Range 4–20 nm under Pulsed Laser Excitation”, Opt. Spectrosc., 131:10 (2023), 990  crossref
    8. I. S. Abramov, S. V. Golubev, E. D. Gospodchikov, A. G. Shalashov, “Expansion of laser discharge in xenon jet improves EUV-light emission”, Applied Physics Letters, 123:19 (2023)  crossref
    9. D. G. Reunov, I. V. Malyshev, A. A. Perekalov, A. N. Nechay, N. I. Chkhalo, “Determining the Size of the EUV Laser-Plasma Source for a Microscope”, J. Surf. Investig., 17:4 (2023), 859  crossref
    10. Quantum Electron., 51:8 (2021), 700–707  mathnet  crossref  isi  elib
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    Optics and Spectroscopy Optics and Spectroscopy
    Statistics & downloads:
    Abstract page:86
    Full-text PDF :40
     
      Contact us:
     Terms of Use  Registration to the website  Logotypes © Steklov Mathematical Institute RAS, 2025