Abstract:
The article considers the results of studies of the emission spectra of Kr, Xe upon excitation by pulsed laser radiation. We used Nd: YAG laser, λλ = 1064 nm, ττ = 5 ns, and EpulseEpulse = 0.8 J. The spectral range of 30–200A was studied. We used capillary with dd = 500 μμm and supersonic conical nozzles with dcrdcr = 145 μμm, 2αα = 12∘∘, LL = 5 mm, and dcrdcr = 540 μμm, 2αα = 11∘∘, LL = 5 mm to form a gas jet. The emission spectra for various gas targets were obtained, the obtained spectra were deciphered, and the ions emitting in this spectral range were determined. We observed that with increasing particle concentration in the zone of laser spark, the radiation intensity increases. In this case, the intensity of ion lines with high degrees of ionization increases faster.
Citation:
A. N. Nechai, A. A. Perekalov, N. N. Salashchenko, N. I. Chkhalo, “Emission spectra of heavy inert gases Kr, Xe in the range 3–20 nm under pulsed laser excitation using various gas jets as targets”, Optics and Spectroscopy, 129:3 (2021), 266–271; Optics and Spectroscopy, 129:3 (2021), 363–368
\Bibitem{NecPerSal21}
\by A.~N.~Nechai, A.~A.~Perekalov, N.~N.~Salashchenko, N.~I.~Chkhalo
\paper Emission spectra of heavy inert gases Kr, Xe in the range 3--20 nm under pulsed laser excitation using various gas jets as targets
\jour Optics and Spectroscopy
\yr 2021
\vol 129
\issue 3
\pages 266--271
\mathnet{http://mi.mathnet.ru/os169}
\crossref{https://doi.org/10.21883/OS.2021.03.50652.282-20}
\elib{https://elibrary.ru/item.asp?id=46486221}
\transl
\jour Optics and Spectroscopy
\yr 2021
\vol 129
\issue 3
\pages 363--368
\crossref{https://doi.org/10.1134/S0030400X21030127}
Linking options:
https://www.mathnet.ru/eng/os169
https://www.mathnet.ru/eng/os/v129/i3/p266
This publication is cited in the following 10 articles:
I.S. Abramov, S.V. Golubev, E.D. Gospodchikov, A.G. Shalashov, A.A. Perekalov, A.N. Nechay, N.I. Chkhalo, “Laser discharge in a high-pressure jet of heavy noble gas: Expansion of emitting volume promises an efficient source of EUV light for lithography”, Phys. Rev. Applied, 23:2 (2025)
M. S. Mikhailenko, A. E. Pestov, A. K. Chernyshev, N. I. Chkhalo, “Investigation of the Angular Dependences of the Velocities of Ion-Beam Sputtering of Metals for the Synthesis of Mask Blanks”, Tech. Phys., 69:5 (2024), 1279
M. S. Mikhailenko, A. E. Pestov, A. K. Chernyshev, N. I. Chkhalo, “Investigation of the Angular Dependences of the Velocities of Ion-Beam Sputtering of Metals for the Synthesis of Mask Blanks”, Tech. Phys., 69:6 (2024), 1683
S. Yu. Zuev, A. Ya. Lopatin, V. I. Luchin, N. N. Salashchenko, N. N. Tsybin, N. I. Chkhalo, “Protective Freely Hanging Films for Projection Lithography Installations in the Extreme UV Range”, Mikroelektronika, 52:5 (2023), 354
V. E. Guseva, A. N. Nechay, A. A. Perekalov, N. N. Salashchenko, N. I. Chkhalo, “Emission Spectra of Molecular Gases CHF3, CCl2F2, SF6 in the Range 3–20 nm under Pulsed Laser Excitation Using Various Gas Jets as Targets”, Opt. Spectrosc., 131:6 (2023), 391
S. Yu. Zuev, A. Ya. Lopatin, V. I. Luchin, N. N. Salashchenko, N. N. Tsybin, N. I. Chkhalo, “Protective Free-Standing Films for Projection Lithography Installations in the Extreme UV Range”, Russ Microelectron, 52:5 (2023), 344
V. E. Guseva, A. N. Nechay, A. A. Perekalov, N. N. Salashchenko, N. I. Chkhalo, “Emission Spectra of Liquid-Jet Targets of Hexane C6H14, Dichloromethane CH2Cl2, Methylene Bromide CH3Br in the Range 4–20 nm under Pulsed Laser Excitation”, Opt. Spectrosc., 131:10 (2023), 990
I. S. Abramov, S. V. Golubev, E. D. Gospodchikov, A. G. Shalashov, “Expansion of laser discharge in xenon jet improves EUV-light emission”, Applied Physics Letters, 123:19 (2023)
D. G. Reunov, I. V. Malyshev, A. A. Perekalov, A. N. Nechay, N. I. Chkhalo, “Determining the Size of the EUV Laser-Plasma Source for a Microscope”, J. Surf. Investig., 17:4 (2023), 859