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Optics and Spectroscopy, 2021, Volume 129, Issue 7, Pages 889–898
DOI: https://doi.org/10.21883/OS.2021.07.51080.1847-21 (Mi os100) 		 
Physical optics

Ellipsometry of metallic films under the conditions of the anomalous skin effect

A. B. Sotskia, E. A. Chudakova, L. I. Sotskayab

a Mogilev State A. A. Kuleshov University
b Belarusian-Russian University, Mogilev, Belarus
Full-text PDF (996 kB)
DOI: https://doi.org/10.21883/OS.2021.07.51080.1847-21
Abstract: Inhomogeneous Fredholm's integral equations of the second kind are formulated, which describe the fields of TE and TM polarized waves in metallic films with allowance for the anomalous skin effect. The equations are solved numerically by the quadrature method. The electric fields in gold and aluminum films located on a silicon substrate and the angular dependences of the polarization angles of light reflected from the films are investigated. It is found that the solution of the inverse problem of multi-angle ellipsometry for metallic films using the standard model of the normal skin effect is characterized by instability of the reconstructed complex refractive index of the metal with a change in the thickness of the metallic film.
Keywords: metallic film, anomalous skin effect, integral equations, multi-angle ellipsometry.
Funding agency Grant number
State Assignment of the Republic of Belarus 1.15
This work was financially supported by the State Program of Scientific Research of the Republic of Belarus 1.15 “Photonics and Electronics for Innovations”.
Received: 26.02.2021
Revised: 28.02.2021
Accepted: 19.03.2021
English version:
Optics and Spectroscopy, 2021, Volume 129, Issue 9, Pages 1023–1032
DOI: https://doi.org/10.1134/S0030400X21070195
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. B. Sotski, E. A. Chudakov, L. I. Sotskaya, “Ellipsometry of metallic films under the conditions of the anomalous skin effect”, Optics and Spectroscopy, 129:7 (2021), 889–898; Optics and Spectroscopy, 129:9 (2021), 1023–1032
Citation in format AMSBIB
\Bibitem{SotChuSot21}
\by A.~B.~Sotski, E.~A.~Chudakov, L.~I.~Sotskaya
\paper Ellipsometry of metallic films under the conditions of the anomalous skin effect
\jour Optics and Spectroscopy
\yr 2021
\vol 129
\issue 7
\pages 889--898
\mathnet{http://mi.mathnet.ru/os100}
\crossref{https://doi.org/10.21883/OS.2021.07.51080.1847-21}
\elib{https://elibrary.ru/item.asp?id=46489897}
\transl
\jour Optics and Spectroscopy
\yr 2021
\vol 129
\issue 9
\pages 1023--1032
\crossref{https://doi.org/10.1134/S0030400X21070195}
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