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Russian Journal of Nonlinear Dynamics, 2020, Volume 16, Number 1, Pages 85–92
DOI: https://doi.org/10.20537/nd200107 (Mi nd698) 		 
Nonlinear physics and mechanics

MEMS Sensor of Force

R. Hart'anskýa, J. Hrickob, M. Mierkaa, J. Halgoša, M. Dzuriša

a Institute of Electrical Engineering, Faculty of Electrical Engineering and Information Technology, Slovak University of Technology, Bratislava, Slovakia
b Institute of Informatics, Slovak Academy of Sciences Banska Bystrica, Slovakia
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DOI: https://doi.org/10.20537/nd200107
Abstract: The paper is focused on the design of a compact compliant mechanical body (CCMB) that will be used as a transducer of the one-axis force to the distance of two plates. The conversion principle of the distance (which carries information about the acting force) to the frequency of the electrical signal is carefully described in the article too.
Keywords: compact compliant mechanical body, mechanical force sensor, transfer response.
Funding agency Grant number
Agentúra na Podporu Výskumu a Vývoja APVV-14-0076
Scientific Grant Agency VEGA 2/0155/19
This work was supported by the Slovak Research and Development Agency under contract No.: APVV- 14-0076 — “MEMS structures based on load cell” and by the national scientific grant agency VEGA under project No.: 2/0155/19 — “Processing sensory data via Artificial Intelligence methods”.
Received: 31.05.2019
Accepted: 01.10.2019
Bibliographic databases:
Document Type: Article
MSC: 93B18, 93B52
Language: English
Citation: R. Hart'anský, J. Hricko, M. Mierka, J. Halgoš, M. Dzuriš, “MEMS Sensor of Force”, Rus. J. Nonlin. Dyn., 16:1 (2020), 85–92
Citation in format AMSBIB
\Bibitem{HarHriMie20}
\by R. Hart'ansk\'y, J.~Hricko, M.~Mierka, J. Halgo{\v s}, M. Dzuri{\v s}
\paper MEMS Sensor of Force
\jour Rus. J. Nonlin. Dyn.
\yr 2020
\vol 16
\issue 1
\pages 85--92
\mathnet{http://mi.mathnet.ru/nd698}
\crossref{https://doi.org/10.20537/nd200107}
\scopus{https://www.scopus.com/record/display.url?origin=inward&eid=2-s2.0-85084461337}
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