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Nanosystems: Physics, Chemistry, Mathematics, 2023, Volume 14, Issue 1, Pages 86–88
DOI: https://doi.org/10.17586/2220-8054-2023-14-1-86-88 (Mi nano1165) 		 
PHYSICS

Electrical properties of “metal-carbon film” contact

Rostyslav V. Shalayev, Anatoliy I. Izotov, Vladimir V. Syrotkin

Galkin Donetsk Institute for Physics and Engineering, Donetsk, Russia
Full-text PDF (303 kB)
DOI: https://doi.org/10.17586/2220-8054-2023-14-1-86-88
Abstract: Magnetron sputtering was used to obtain carbon films on of metal substrates of two types: titanium and tool chromium steel. The temperature dependence of the resistance of the films, which has a semiconductor character, has been studied. The current-voltage characteristics of the metal-carbon film contact were determined, which indicate the presence of the Schottky barrier junction.
Keywords: carbon film, magnetron sputtering, metal-semiconductor contact, Schottky barrier.
Received: 24.01.2023
Revised: 02.02.2023
Accepted: 05.02.2023
Bibliographic databases:
Document Type: Article
Language: English
Citation: Rostyslav V. Shalayev, Anatoliy I. Izotov, Vladimir V. Syrotkin, “Electrical properties of “metal-carbon film” contact”, Nanosystems: Physics, Chemistry, Mathematics, 14:1 (2023), 86–88
Citation in format AMSBIB
\Bibitem{ShaIzoSyr23}
\by Rostyslav~V.~Shalayev, Anatoliy~I.~Izotov, Vladimir~V.~Syrotkin
\paper Electrical properties of ``metal-carbon film'' contact
\jour Nanosystems: Physics, Chemistry, Mathematics
\yr 2023
\vol 14
\issue 1
\pages 86--88
\mathnet{http://mi.mathnet.ru/nano1165}
\crossref{https://doi.org/10.17586/2220-8054-2023-14-1-86-88}
\elib{https://elibrary.ru/item.asp?id=50315534}
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