Method of inductance calculation of multilayer finite thickness superconductor structures

The problem of mathematical simulation and calculation of current and inductances of multilayer planar superconductor microelectronic structures is considered. The rigorous definition of the problem is proposed. The London model of superconductor current, assumptions of smallness of the thickness compared to linear sizes of structure and 3D character of magnetic field are taken into account. The problem is reduced to integral equations which take into account finite thickness of the layers of superconductors. Finite element technique based on linear elements and triangular grids is proposed. The program is developed and results of calculations are presented. The mathematical model, numerical method and program are precised and fast enough to perform effective calculationsof microelectronic circuits and SQUIDs parameters. The program can be applied for essentially 3D structures where other existing programs meet serious problems.