An estimation of electron beam current density based on ricking up curves subject to the scattering in the diaphragm

Mathematical model of interaction between electron beam and an sharp edge diaphragm subject to electron scattering and absorption in the diaphragm material is considered. The model is used for an estimation of electron beam distribution of current density by a set of a ricking up curves based on computing measurement systems theory. There is shown that standard model without including scattering process cannot give satisfying estimation of beam diameter and distribution of current density.