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Matematicheskoe modelirovanie, 2003, Volume 15, Number 5, Pages 47–53 (Mi mm458)  
This article is cited in 1 scientific paper (total in 1 paper)

Linear measurements in scanning electron microscopy based on morphological analysis of the images

E. A. Grachev, D. M. Ustinin, A. I. Chulichkov

M. V. Lomonosov Moscow State University, Faculty of Physics
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Abstract: Problems of finding particular object on SEM video signal and measurement of its size have great importance in electron microscopy. New approach is proposed to solution of this problems based on morphological analysis of images. Method is successfully used in electron beam lithography and microscopy.
Received: 22.11.2001
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Language: Russian
Citation: E. A. Grachev, D. M. Ustinin, A. I. Chulichkov, “Linear measurements in scanning electron microscopy based on morphological analysis of the images”, Matem. Mod., 15:5 (2003), 47–53
Citation in format AMSBIB
\Bibitem{GraUstChu03}
\by E.~A.~Grachev, D.~M.~Ustinin, A.~I.~Chulichkov
\paper Linear measurements in scanning electron microscopy based on morphological analysis of the images
\jour Matem. Mod.
\yr 2003
\vol 15
\issue 5
\pages 47--53
\mathnet{http://mi.mathnet.ru/mm458}
\zmath{https://zbmath.org/?q=an:1033.81527}
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    • This publication is cited in the following 1 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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    		Математическое моделирование
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