Three-dimensional modeling of charge exchange between ions and metallic surfaces

Ion beams are widely used for surface analysis and modification. The modeling of charge exchange between ion beams and surface is necessary for its fundamental basis investigation, as well as for quantitative diagnostics, because the charged particles (ions) are registered in the most of experimental setups. Due to significant computational complexity, until the last time only approximate 1D and 2D numerical methods were used for charge exchange modeling. Last years the authors created computer program for direct 3D modeling of charge exchange on graphical processing units. In this paper some calculations examples are given and the problem of initial state definition is investigated.