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Matematicheskoe modelirovanie, 2017, Volume 29, Number 10, Pages 75–85 (Mi mm3900)  
This article is cited in 11 scientific papers (total in 11 papers)

Numerical modelling of vapor phase epitaxy with diffusion processes

G. N. Kuvyrkin, I. Yu. Savelyeva, A. V. Zhuravsky

Bauman Moscow State Technical University
Full-text PDF (365 kB) Citations (11)
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Abstract: The mathematical model of heat conduction with features of heat and mass transfer during vapor phase epitaxy on a curvilinear surface is offered. With use of an integro-interpolation method the differential scheme is constructed, the numerical solution of an objective is found. Approximation and stability of the differential scheme are investigated. Examples of numerical calculation for various materials are provided.
Keywords: vapor phase epitaxy, heat equation, curvilinear surface, difference scheme.
Funding agency Grant number
Ministry of Education and Science of the Russian Federation 9.2422.2017/ПЧ
9.7784.2017/БЧ
Received: 09.02.2017
English version:
Mathematical Models and Computer Simulations, 2018, Volume 10, Issue 3, Pages 299–307
DOI: https://doi.org/10.1134/S2070048218030080
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: G. N. Kuvyrkin, I. Yu. Savelyeva, A. V. Zhuravsky, “Numerical modelling of vapor phase epitaxy with diffusion processes”, Matem. Mod., 29:10 (2017), 75–85; Math. Models Comput. Simul., 10:3 (2018), 299–307
Citation in format AMSBIB
\Bibitem{KuvSavZhu17}
\by G.~N.~Kuvyrkin, I.~Yu.~Savelyeva, A.~V.~Zhuravsky
\paper Numerical modelling of vapor phase epitaxy with diffusion processes
\jour Matem. Mod.
\yr 2017
\vol 29
\issue 10
\pages 75--85
\mathnet{http://mi.mathnet.ru/mm3900}
\elib{https://elibrary.ru/item.asp?id=30060382}
\transl
\jour Math. Models Comput. Simul.
\yr 2018
\vol 10
\issue 3
\pages 299--307
\crossref{https://doi.org/10.1134/S2070048218030080}
\scopus{https://www.scopus.com/record/display.url?origin=inward&eid=2-s2.0-85048173026}
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    • This publication is cited in the following 11 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    		Математическое моделирование
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