Multiscale simulation of nonlinear processes in technical microsystems

The purpose of this work is analysis of multiscale numerical approach to modeling of nonlinear processes in micron size technical systems As an example the calculation of a microflow in installation of a supersonic cold gas sputtering (SCGS) is considered. This problem is modern for many areas in nanotechnologies. The presented approach combines calculations of gasdynamic processes at the macrolevel by the gas dynamics equations and molecular modeling at micro- and nanolevels. Splitting on physical processes and scales, grid methods and molecular dynamics methods are the cornerstone of approach. The main results of the work are calculated parameters of binary gas mixture supersonic flow in the SCGS installation. They confirm both the efficiency of the developed approach and the possibility of its use to optimize the parameters of technical microsystems like this.