Simulation of RF plasma jet streams at low pressures

This paper describes a mathematical model of the flow of RF plasma at a pressure of 13.3–133 Pa in the transition regime at Knudsen $8\cdot10^{-3}\leqslant Kn \leqslant 7\cdot10^{-2}$ for the carrier gas. The model is based on a statistical approach to the neutral component and on continuum model for the electronic and ionic components. The results of calculation of the neutral component of plasma flow in the undisturbed flow and with specimen circumfluence as well a model problem for the electron-ion gas are presented.