Abstract:
This paper describes a mathematical model of the flow of RF plasma at a pressure of 13.3–133 Pa in the transition regime at Knudsen 8⋅10−3⩽Kn⩽7⋅10−2 for the carrier gas. The model is based on a statistical approach to the neutral component and on continuum model for the electronic and ionic components. The results of calculation of the neutral component of plasma flow in the undisturbed flow and with specimen circumfluence as well a model problem for the electron-ion gas are presented.
This publication is cited in the following 14 articles:
I. Sh. Abdullin, V. S. Zheltukhin, A. Yu. Shemakhin, “End-to-end Mathematical Model of a Radio-Frequency Inductive Jet Discharge of Lowered Pressure”, J Eng Phys Thermophy, 2024
A. Yu. Shemakhin, “Simulation of Low-Pressure Inductively Coupled Plasma with Displacement Potential and Gas Flow”, Plasma Phys. Rep., 50:1 (2024), 89
A. Yu. Shemakhin, “Simulation of Low-Pressure Inductively Coupled Plasma with Displacement Potential and Gas Flow”, Fizika plazmy, 50:1 (2024), 74
E. S. Samsonova, V. S. Zheltukhin, A. Y. Shemakhin, E. Y. Shemakhin, G. B. Kiselev, “A Two-Dimensional Axisymmetric Model for the Low Pressure Inductively Coupled RF Plasma with Gas Flow”, High Energy Chem, 58:S3 (2024), S393
Shemakhin A.Yu., Zheltukhin V.S., Shemakhin E.Yu., “Mathematical Simulation of a High-Frequency Low-Pressure Discharge With Gas Injection in Non-Local Approximation: Electro- and Plasmadynamics”, J. Eng. Phys. Thermophys., 94:5 (2021), 1336–1343
A Yu Shemakhin, V S Zheltukhin, E Yu Shemakhin, I S Pryalukin, “Study of RF plasma flow at low pressure: electron temperature influence”, J. Phys.: Conf. Ser., 1588:1 (2020), 012062
A Yu Shemakhin, V S Zheltukhin, E Yu Shemakhin, T N Terentev, A O Sofronitsky, “Experimental installation to study the RF plasma flow at low pressures with experiment data synchronization”, J. Phys.: Conf. Ser., 1588:1 (2020), 012018
Shemakhin A.Yu., Zheltukhin V.S., “Mathematical Modelling of Rf Plasma Flow At Low Pressures With 3D Electromagnetic Field”, Adv. Mater. Sci. Eng., 2019, 7120217
Zheltukhin V.S., Shemakhin A.Yu., 12Th International Conference - Mesh Methods For Boundary: Value Problems and Applications, Journal of Physics Conference Series, 1158, IOP Publishing Ltd, 2019
A. Yu. Shemakhin, V. S. Zheltukhin, “Mathematical modeling of rf plasma flow with metastable atoms at low pressure”, Math. Montisnigri, 39 (2017), 126–132
A. Yu. Shemakhin, V. S. Zheltukhin, “Mathematical modelling of rf plasma flow at low pressure with electrodynamics”, International Conference - the Physics of Low Temperature Plasma (PLTP-2017), Journal of Physics Conference Series, 927, IOP Publishing Ltd, 2017, UNSP 012055
V. S. Zheltukhin, A. Yu. Shemakhin, “Simulation of rarefied low pressure rf plasma flow around the sample”, VIII All-Russian (With International Participation) Conference on Low Temperature Plasma in the Processes of Functional Coating Preparation, Journal of Physics Conference Series, 789, IOP Publishing Ltd, 2017, UNSP 012071
Brzhozovskii B., Gestrin S., Martynov V., Zinina E., International Conference Problems of Thermal Physics and Power Engineering (Ptppe-2017), Journal of Physics Conference Series, 891, IOP Publishing Ltd, 2017
Shemakhin A.Yu., Zheltukhin V.S., Khubatkhuzin A.A., “Numerical and Experimental Study of a Warming Up Effect of An Underexpanded Rarefied Rf Plasma Jet Outflowing Into a Flooded Area”, XXXI International Conference on Equations of State For Matter (ELBRUS 2016), Journal of Physics Conference Series, 774, IOP Publishing Ltd, 2016, UNSP 012167
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