Monte-Carlo simulations of spectra for elastic pick electron spectroscopy

A method for detection of hydrogen by mean of electron beam in various samples is described. In electron energy spectrum different elastic peaks are characterized by various masses of element composition in the explored sample. This method is often known as a method of an electron Rutherford scattering (Rutherford backscattering or RBS) or elastic pick electron spectroscopy (EPES). Probe depth is restricted by inelastic mean free path that for $10$ keV electrons is about $l_\mathrm{in}=12$ nm for carbon. That's why the given method needs energy analyzers with energy resolution better then $\Delta E/E_0\approx0.0005$. Principles of above method for the hydrogen isotope analysis in hydrocarbons are discussed.