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Matematicheskoe modelirovanie, 2004, Volume 16, Number 6, Pages 28–30 (Mi mm266)  
XII International Conference on Computing Mechanics and Advanced Applied Codes

Numerical simulation of the $\alpha$-Si:H film groth process in PECVD reactors

Yu. E. Gorbachev, M. A. Zatevakhin, A. A. Ignatyev

Institute for High Performance Computing and Data Bases
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Language: Russian
Citation: Yu. E. Gorbachev, M. A. Zatevakhin, A. A. Ignatyev, “Numerical simulation of the $\alpha$-Si:H film groth process in PECVD reactors”, Matem. Mod., 16:6 (2004), 28–30
Citation in format AMSBIB
\Bibitem{GorZatIgn04}
\by Yu.~E.~Gorbachev, M.~A.~Zatevakhin, A.~A.~Ignatyev
\paper Numerical simulation of the $\alpha$-Si:H film groth process in PECVD reactors
\jour Matem. Mod.
\yr 2004
\vol 16
\issue 6
\pages 28--30
\mathnet{http://mi.mathnet.ru/mm266}
\zmath{https://zbmath.org/?q=an:1079.76617}
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    		Математическое моделирование
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