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XII International Conference on Computing Mechanics and Advanced Applied Codes
Numerical simulation of the $\alpha$-Si:H film groth process in PECVD reactors
Yu. E. Gorbachev, M. A. Zatevakhin, A. A. Ignatyev Institute for High Performance Computing and Data Bases
Citation:
Yu. E. Gorbachev, M. A. Zatevakhin, A. A. Ignatyev, “Numerical simulation of the $\alpha$-Si:H film groth process in PECVD reactors”, Matem. Mod., 16:6 (2004), 28–30
Linking options:
https://www.mathnet.ru/eng/mm266 https://www.mathnet.ru/eng/mm/v16/i6/p28
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Statistics & downloads: |
Abstract page: | 388 | Full-text PDF : | 158 | References: | 45 | First page: | 1 |
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