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Matematicheskoe modelirovanie, 1990, Volume 2, Number 7, Pages 62–84 (Mi mm2412)  
Mathematical models of phenomena and processes

Mathematical modeling of $\mathrm{GaAs}/\mathrm{AlGaAs}$ structures growth processes in flow gas-epitacsial reactors

A. I. Zhmakin, Yu. N. Makarov

Ioffe Physico-Technical Institute, Russian Academy of Sciences
Full-text PDF (2928 kB)
Abstract: The survey of mathematical models used for numerical investigation of stationary and nonstationary processes in flow gas-epitaxial reactors is given. The models of flow as well as models of mass transfer for structure growing in Al-Ga-As systems are considered.
Received: 21.09.1989
Bibliographic databases:
UDC: 532.516:621.382.002
Language: Russian
Citation: A. I. Zhmakin, Yu. N. Makarov, “Mathematical modeling of $\mathrm{GaAs}/\mathrm{AlGaAs}$ structures growth processes in flow gas-epitacsial reactors”, Matem. Mod., 2:7 (1990), 62–84
Citation in format AMSBIB
\Bibitem{ZhmMak90}
\by A.~I.~Zhmakin, Yu.~N.~Makarov
\paper Mathematical modeling of $\mathrm{GaAs}/\mathrm{AlGaAs}$ structures growth processes in flow gas-epitacsial reactors
\jour Matem. Mod.
\yr 1990
\vol 2
\issue 7
\pages 62--84
\mathnet{http://mi.mathnet.ru/mm2412}
\zmath{https://zbmath.org/?q=an:0993.82503}
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    		Математическое моделирование
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