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Matematicheskoe modelirovanie, 1996, Volume 8, Number 1, Pages 25–38 (Mi mm1527)  
Mathematical models and computer experiment

About mathematical modelling of multidimensional ion implantation problems

I. E. Mozolevski

Belarusian State University
Full-text PDF (1419 kB)
Abstract: Some aspects of simulation of interaction of fluxes of acseleratedi ons with solids in multidimensional problems of ion implantation are considered. Mathematical model and computational algorithm for its realisation are proposed. The numerical simulation results are presented and comparison with experimental data and Monte-Carlo simulation results is effectuated.
Received: 27.09.1994
Bibliographic databases:
Language: Russian
Citation: I. E. Mozolevski, “About mathematical modelling of multidimensional ion implantation problems”, Matem. Mod., 8:1 (1996), 25–38
Citation in format AMSBIB
\Bibitem{Moz96}
\by I.~E.~Mozolevski
\paper About mathematical modelling of multidimensional ion implantation problems
\jour Matem. Mod.
\yr 1996
\vol 8
\issue 1
\pages 25--38
\mathnet{http://mi.mathnet.ru/mm1527}
\zmath{https://zbmath.org/?q=an:0982.82503}
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  • https://www.mathnet.ru/eng/mm/v8/i1/p25
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    		Математическое моделирование
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