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Matematicheskoe modelirovanie, 1998, Volume 10, Number 9, Pages 35–40 (Mi mm1321)  
Mathematical models and computer experiment

Macroparameters of an effective distribution and of a sourse function in the mathematical model of shadowed sputtering

E. P. Zhidkov, L. A. Sevastianov

Peoples Friendship University of Russia
Full-text PDF (534 kB)
Abstract: The investigation is presented of an existence of the unique shadowing shields for a set of close by their characteristics and sputtering conditions effective distribution of sputtered particles and source function, so as their stability for small variations of shadowed sputtering parameters.
Received: 02.04.1998
Language: Russian
Citation: E. P. Zhidkov, L. A. Sevastianov, “Macroparameters of an effective distribution and of a sourse function in the mathematical model of shadowed sputtering”, Matem. Mod., 10:9 (1998), 35–40
Citation in format AMSBIB
\Bibitem{ZhiSev98}
\by E.~P.~Zhidkov, L.~A.~Sevastianov
\paper Macroparameters of an effective distribution and of a~sourse function in the mathematical model of shadowed sputtering
\jour Matem. Mod.
\yr 1998
\vol 10
\issue 9
\pages 35--40
\mathnet{http://mi.mathnet.ru/mm1321}
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