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Matematicheskoe modelirovanie, 1998, Volume 10, Number 4, Pages 13–22 (Mi mm1265)  
Mathematical models and computer experiment

The mathematical model of shadowed sputtering

L. A. Sevastianov

Peoples Friendship University of Russia
Full-text PDF (833 kB)
Abstract: The analysis of shadowing effects in vacuum sputtering process shows that the mathematical model of the sputtering through arbitrary shield on a substrate of any form is described by the integral equation of the first type.
Received: 27.08.1997
Language: Russian
Citation: L. A. Sevastianov, “The mathematical model of shadowed sputtering”, Matem. Mod., 10:4 (1998), 13–22
Citation in format AMSBIB
\Bibitem{Sev98}
\by L.~A.~Sevastianov
\paper The mathematical model of shadowed sputtering
\jour Matem. Mod.
\yr 1998
\vol 10
\issue 4
\pages 13--22
\mathnet{http://mi.mathnet.ru/mm1265}
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    		Математическое моделирование
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