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Zhurnal Tekhnicheskoi Fiziki, 1987, Volume 57, Issue 6, Pages 1204–1206
(Mi jtf772)
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Brief Communications
SHARP ADMIXTURE PROFILES IN SILICON STRUCTURES GROWN FROM THE
MOLECULAR-FLOW IN VACUUM
A. Yu. Andreev, V. P. Kuznetsov, V. A. Tolomasov Gor'kii State University
Received: 19.06.1986
Citation:
A. Yu. Andreev, V. P. Kuznetsov, V. A. Tolomasov, “SHARP ADMIXTURE PROFILES IN SILICON STRUCTURES GROWN FROM THE
MOLECULAR-FLOW IN VACUUM”, Zhurnal Tekhnicheskoi Fiziki, 57:6 (1987), 1204–1206
Linking options:
https://www.mathnet.ru/eng/jtf772 https://www.mathnet.ru/eng/jtf/v57/i6/p1204
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