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Zhurnal Tekhnicheskoi Fiziki, 2016, Volume 86, Issue 1, Pages 50–54 (Mi jtf6654)  
Plasma

Characteristics of a localized gas discharge

A. V. Abramov, E. A. Pankratova, I. S. Surovtsev, D. Yu. Zolototrubov

Voronezh State Academy of Building and Architecture
Full-text PDF (204 kB)
Abstract: The rf capacitive gas discharge with an interelectrode distance of 15–200 $\mu$m is studied, and possible forms of its existence are established. The conditions for the formation of discrete microdischarges with a preset geometry, which are localized near some elements of the surfaces of the electrodes, are formulated.
Keywords: Glow Discharge, Versus Curve, Interelectrode Distance, Electron Avalanche, Work Chamber.
Received: 30.07.2014
English version:
Technical Physics, 2016, Volume 61, Issue 1, Pages 47–52
DOI: https://doi.org/10.1134/S1063784216010023
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. V. Abramov, E. A. Pankratova, I. S. Surovtsev, D. Yu. Zolototrubov, “Characteristics of a localized gas discharge”, Zhurnal Tekhnicheskoi Fiziki, 86:1 (2016), 50–54; Tech. Phys., 61:1 (2016), 47–52
Citation in format AMSBIB
\Bibitem{AbrPanSur16}
\by A.~V.~Abramov, E.~A.~Pankratova, I.~S.~Surovtsev, D.~Yu.~Zolototrubov
\paper Characteristics of a localized gas discharge
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2016
\vol 86
\issue 1
\pages 50--54
\mathnet{http://mi.mathnet.ru/jtf6654}
\elib{https://elibrary.ru/item.asp?id=25669125}
\transl
\jour Tech. Phys.
\yr 2016
\vol 61
\issue 1
\pages 47--52
\crossref{https://doi.org/10.1134/S1063784216010023}
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