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Zhurnal Tekhnicheskoi Fiziki, 2016, Volume 86, Issue 3, Pages 110–113
(Mi jtf6611)
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This article is cited in 1 scientific paper (total in 1 paper)
Physics of nanostructures
Physical properties of carbon films obtained by methane pyrolysis in an electric field
S. K. Brantova, A. N. Tereshchenkoa, E. A. Steinmana, E. B. Yakimovb a Institute of Solid State Physics, Russian Academy of Sciences, Chernogolovka, Moscow region
b Institute of Problems of Microelectronics and Ultrapure Materials, Russian Academy of Sciences, Chernogolovka, Moscow oblast, Russia
Abstract:
A method of synthesizing carbon films on single-crystal silicon substrates by methane pyrolysis in an electrical field is suggested. The pressure and temperature arising in a working chamber when the substrate is exposed to C$^{-4}$ ions during pyrolysis are measured. Ion bombardment generates nuclei in the form of fibers about 2 $\mu$m in diameter providing the growth of a polycrystalline film. The resulting material is examined using electron microscopy and photo- and cathodoluminescence. Synthesized films are a composite material the matrix of which contains nanoclusters of a dissimilar crystalline nature. The effect of considerable two-stage decrease in the resistivity of the film material with increasing temperature from 300 to 1750 K is discovered. This points to the semiconducting properties of thick carbon films.
Keywords:
Carbon Film, Diamond Film, Working Chamber, Ultradisperse Diamond, Methane Pyrolysis.
Received: 23.06.2015
Citation:
S. K. Brantov, A. N. Tereshchenko, E. A. Steinman, E. B. Yakimov, “Physical properties of carbon films obtained by methane pyrolysis in an electric field”, Zhurnal Tekhnicheskoi Fiziki, 86:3 (2016), 110–113; Tech. Phys., 61:3 (2016), 428–431
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https://www.mathnet.ru/eng/jtf6611 https://www.mathnet.ru/eng/jtf/v86/i3/p110
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