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Zhurnal Tekhnicheskoi Fiziki, 2016, Volume 86, Issue 4, Pages 148–150 (Mi jtf6593)  

This article is cited in 6 scientific papers (total in 6 papers)

Brief Communications

Composition, morphology, and electronic structure of the nanophases created on the SiO$_{2}$ Surface by Ar$^{+}$ ion bombardment

M. B. Yusupjanova, D. A. Tashmukhamedova, B. E. Umirzakov

Tashkent State Technical University
Full-text PDF (397 kB) Citations (6)
Abstract: The influence of Ar$^{+}$ bombardment on the composition and the structure of the SiO$_{2}$/Si surface is studied. A thin Si film is found to form on the SiO$_{2}$ surface subjected to high-dose ion bombardment.
Keywords: Auger Spectrum, Cluster Phase, Nonstoichiometric Oxide, Postimplantation Annealing, Auger Electron Spectroscopy Result.
Received: 08.07.2015
English version:
Technical Physics, 2016, Volume 61, Issue 4, Pages 628–630
DOI: https://doi.org/10.1134/S1063784216040253
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: M. B. Yusupjanova, D. A. Tashmukhamedova, B. E. Umirzakov, “Composition, morphology, and electronic structure of the nanophases created on the SiO$_{2}$ Surface by Ar$^{+}$ ion bombardment”, Zhurnal Tekhnicheskoi Fiziki, 86:4 (2016), 148–150; Tech. Phys., 61:4 (2016), 628–630
Citation in format AMSBIB
\Bibitem{YusTasUmi16}
\by M.~B.~Yusupjanova, D.~A.~Tashmukhamedova, B.~E.~Umirzakov
\paper Composition, morphology, and electronic structure of the nanophases created on the SiO$_{2}$ Surface by Ar$^{+}$ ion bombardment
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2016
\vol 86
\issue 4
\pages 148--150
\mathnet{http://mi.mathnet.ru/jtf6593}
\elib{https://elibrary.ru/item.asp?id=25669415}
\transl
\jour Tech. Phys.
\yr 2016
\vol 61
\issue 4
\pages 628--630
\crossref{https://doi.org/10.1134/S1063784216040253}
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  • https://www.mathnet.ru/eng/jtf/v86/i4/p148
  • This publication is cited in the following 6 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    Zhurnal Tekhnicheskoi Fiziki Zhurnal Tekhnicheskoi Fiziki
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