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Zhurnal Tekhnicheskoi Fiziki, 2016, Volume 86, Issue 9, Pages 129–135
(Mi jtf6456)
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This article is cited in 1 scientific paper (total in 1 paper)
Physical electronics
Proton-beam writing channel based on an electrostatic accelerator
A. S. Lapin, V. A. Rebrov, S. V. Kolin’ko, V. F. Salivon, A. G. Ponomarev Institute for Applied Physics, Ukrainian AS, Sumy
Abstract:
We have described the structure of the proton-beam writing channel as a continuation of a nuclear scanning microprobe channel. The problem of the accuracy of positioning a probe by constructing a new high-frequency electrostatic scanning system has been solved. Special attention has been paid to designing the probe-forming system and its various configurations have been considered. The probe-forming system that best corresponds to the conditions of the lithographic process has been found based on solving the problem of optimizing proton beam formation. A system for controlling beam scanning using multifunctional module of integrated programmable logic systems has been developed.
Received: 09.07.2015
Citation:
A. S. Lapin, V. A. Rebrov, S. V. Kolin’ko, V. F. Salivon, A. G. Ponomarev, “Proton-beam writing channel based on an electrostatic accelerator”, Zhurnal Tekhnicheskoi Fiziki, 86:9 (2016), 129–135; Tech. Phys., 61:9 (2016), 1411–1417
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https://www.mathnet.ru/eng/jtf6456 https://www.mathnet.ru/eng/jtf/v86/i9/p129
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Abstract page: | 24 | Full-text PDF : | 6 |
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