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Physical science of materials
Planarization of a surface of nanoporous silica–titania composition by atomic-molecular chemical assembly
V. V. Luchinin, M. F. Panov, A. A. Romanov Saint Petersburg Electrotechnical University "LETI"
Abstract:
The processes involved in the planarization of the surface of nanoporous SiO$_{2}$ by the atomicmolecular deposition of nanoscale TiO$_{2}$ films were studied in regimes with different degrees of penetration of TiO$_{2}$ into SiO$_{2}$ nanopores. The technological process parameters that correspond to different regimes of surface planarization were examined. The degree of penetration of TiO$_{2}$ into SiO$_{2}$ nanopores was monitored using reflection ellipsometry by measuring the depth distribution of the refraction index within the two-layer model.
Received: 13.10.2016
Citation:
V. V. Luchinin, M. F. Panov, A. A. Romanov, “Planarization of a surface of nanoporous silica–titania composition by atomic-molecular chemical assembly”, Zhurnal Tekhnicheskoi Fiziki, 87:5 (2017), 736–740; Tech. Phys., 62:5 (2017), 755–759
Linking options:
https://www.mathnet.ru/eng/jtf6236 https://www.mathnet.ru/eng/jtf/v87/i5/p736
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Abstract page: | 33 | Full-text PDF : | 9 |
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