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Zhurnal Tekhnicheskoi Fiziki, 2017, Volume 87, Issue 9, Pages 1429–1431
DOI: https://doi.org/10.21883/JTF.2017.09.44923.2162 (Mi jtf6140) 		 
This article is cited in 1 scientific paper (total in 1 paper)

Brief Communications

Increase in the accuracy of approximating the profile of the erosion zone in planar magnetrons

A. V. Rogovab, Yu. V. Kapustinab

a National Research Centre "Kurchatov Institute", Moscow
b International Fusion Projects Coordinating Centre, Moscow, Russia
Full-text PDF (141 kB) Citations (1)
DOI: https://doi.org/10.21883/JTF.2017.09.44923.2162
Abstract: It has been shown that the use of the survival function of the Weibull distribution shifted along the ordinate axis allows one to increase the accuracy of the approximation of the normalized profile of an erosion zone in the area from the axis to the maximum sputtering region compared with the previously suggested distribution function of the extremum values. The survival function of the Weibull distribution is used in the area from the maximum to the outer boundary of an erosion zone. The major advantage of using the new approximation is observed for magnetrons with a large central nonsputtered spot and for magnetrons with substantial sputtering in the paraxial zone.
Received: 11.01.2017
English version:
Technical Physics, 2017, Volume 62, Issue 9, Pages 1437–1439
DOI: https://doi.org/10.1134/S1063784217090213
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. V. Rogov, Yu. V. Kapustin, “Increase in the accuracy of approximating the profile of the erosion zone in planar magnetrons”, Zhurnal Tekhnicheskoi Fiziki, 87:9 (2017), 1429–1431; Tech. Phys., 62:9 (2017), 1437–1439
Citation in format AMSBIB
\Bibitem{RogKap17}
\by A.~V.~Rogov, Yu.~V.~Kapustin
\paper Increase in the accuracy of approximating the profile of the erosion zone in planar magnetrons
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2017
\vol 87
\issue 9
\pages 1429--1431
\mathnet{http://mi.mathnet.ru/jtf6140}
\crossref{https://doi.org/10.21883/JTF.2017.09.44923.2162}
\elib{https://elibrary.ru/item.asp?id=29966137}
\transl
\jour Tech. Phys.
\yr 2017
\vol 62
\issue 9
\pages 1437--1439
\crossref{https://doi.org/10.1134/S1063784217090213}
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    • This publication is cited in the following 1 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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