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Zhurnal Tekhnicheskoi Fiziki, 2017, Volume 87, Issue 10, Pages 1585–1591
DOI: https://doi.org/10.21883/JTF.2017.10.45005.2168 (Mi jtf6112) 		 
This article is cited in 5 scientific papers (total in 5 papers)

Physical electronics

Thermostable ferroelectric capacitors based on graded films of barium strontium titanate

A. V. Tumarkinab, S. V. Razumova, V. A. Vol'pyasa, A. G. Gagarina, A. A. Odinetsa, M. V. Zlygostova, E. N. Sapegoa

a Saint Petersburg Electrotechnical University "LETI"
b Daghestan State University, Makhachkala
Full-text PDF (766 kB) Citations (5)
DOI: https://doi.org/10.21883/JTF.2017.10.45005.2168
Abstract: The influence of the pressure of working gas during the ion–plasma sputtering on properties of deposited ferroelectric barium strontium titanate coatings has been experimentally studied. Variations in the of pressure of the working gas during deposition allows the component composition of the deposited layer to be changed, which leads to the diffusion of the phase transition and the improvement of temperature stability of properties of ferroelectric film. The gradation of layers has an impact on the temperature of the dielectric permittivity maximum, the shape of the dependence of the capacity on temperature, and the capacitance–voltage characteristics of the capacitor structures.
Received: 17.01.2017
English version:
Technical Physics, 2017, Volume 62, Issue 10, Pages 1592–1598
DOI: https://doi.org/10.1134/S1063784217100231
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. V. Tumarkin, S. V. Razumov, V. A. Vol'pyas, A. G. Gagarin, A. A. Odinets, M. V. Zlygostov, E. N. Sapego, “Thermostable ferroelectric capacitors based on graded films of barium strontium titanate”, Zhurnal Tekhnicheskoi Fiziki, 87:10 (2017), 1585–1591; Tech. Phys., 62:10 (2017), 1592–1598
Citation in format AMSBIB
\Bibitem{TumRazVol17}
\by A.~V.~Tumarkin, S.~V.~Razumov, V.~A.~Vol'pyas, A.~G.~Gagarin, A.~A.~Odinets, M.~V.~Zlygostov, E.~N.~Sapego
\paper Thermostable ferroelectric capacitors based on graded films of barium strontium titanate
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2017
\vol 87
\issue 10
\pages 1585--1591
\mathnet{http://mi.mathnet.ru/jtf6112}
\crossref{https://doi.org/10.21883/JTF.2017.10.45005.2168}
\elib{https://elibrary.ru/item.asp?id=30067522}
\transl
\jour Tech. Phys.
\yr 2017
\vol 62
\issue 10
\pages 1592--1598
\crossref{https://doi.org/10.1134/S1063784217100231}
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    • This publication is cited in the following 5 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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