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Zhurnal Tekhnicheskoi Fiziki, 2018, Volume 88, Issue 4, Pages 621–627
DOI: https://doi.org/10.21883/JTF.2018.04.45734.2436
(Mi jtf5951)
 

This article is cited in 2 scientific papers (total in 2 papers)

Physical electronics

Cobalt modification of thin rutile films magnetron-sputtered in vacuum

N. N. Afonina, V. A. Logachevab

a Voronezh State Pedagogical University
b Voronezh State University
Full-text PDF (505 kB) Citations (2)
Abstract: Using X-ray phase analysis, atomic force microscopy, and secondary ion mass-spectrometry, the phase formation and component distribution in a Co–TiO$_2$ film system have been investigated during magnetron sputtering of the metal on the oxide and subsequent vacuum annealing. It has been found that cobalt diffuses deep into titanium oxide to form complex oxides CoTi$_2$O$_5$ and CoTiO$_3$. A mechanism behind their formation at grain boundaries throughout the thickness of the TiO$_2$ film is suggested. It assumes the reactive diffusion of cobalt along grain boundaries in the oxide. A quantitative model of reactive interdiffusion in a bilayer polycrystalline metal–oxide film system with limited solubility of components has been developed. The individual diffusion coefficients of cobalt and titanium have been determined in the temperature interval 923–1073 K.
Received: 13.07.2017
English version:
Technical Physics, 2018, Volume 63, Issue 4, Pages 605–611
DOI: https://doi.org/10.1134/S1063784218040023
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: N. N. Afonin, V. A. Logacheva, “Cobalt modification of thin rutile films magnetron-sputtered in vacuum”, Zhurnal Tekhnicheskoi Fiziki, 88:4 (2018), 621–627; Tech. Phys., 63:4 (2018), 605–611
Citation in format AMSBIB
\Bibitem{AfoLog18}
\by N.~N.~Afonin, V.~A.~Logacheva
\paper Cobalt modification of thin rutile films magnetron-sputtered in vacuum
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2018
\vol 88
\issue 4
\pages 621--627
\mathnet{http://mi.mathnet.ru/jtf5951}
\crossref{https://doi.org/10.21883/JTF.2018.04.45734.2436}
\elib{https://elibrary.ru/item.asp?id=32740047}
\transl
\jour Tech. Phys.
\yr 2018
\vol 63
\issue 4
\pages 605--611
\crossref{https://doi.org/10.1134/S1063784218040023}
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  • This publication is cited in the following 2 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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    Zhurnal Tekhnicheskoi Fiziki Zhurnal Tekhnicheskoi Fiziki
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