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Zhurnal Tekhnicheskoi Fiziki, 2018, Volume 88, Issue 4, Pages 572–577
DOI: https://doi.org/10.21883/JTF.2018.04.45726.2346 (Mi jtf5943) 		 
This article is cited in 1 scientific paper (total in 1 paper)

Physics of nanostructures

Improved laser scribing of transparent conductive oxide for fabrication of thin-film solar module

F. S. Egorovab, A. V. Kukinc, E. I. Terukovcd, A. S. Titovcd

a OOO Khevel, Novocheboksarsk, Russia
b Chuvash State University
c R&D Center TFTE, St.-Petersburg
d Ioffe Institute, St. Petersburg
Full-text PDF (1337 kB) Citations (1)
DOI: https://doi.org/10.21883/JTF.2018.04.45726.2346
Abstract: Nonuniform thickness of the front transparent conductive oxide (TCO) used for fabrication of thin-film solar module (TFSM) based on micromorphic technology affects P1 laser scribing (P1 scribing on the TCO front layer). A method for improvement of the thickness uniformity of the front TCO using modification of the existing system for gas supply of the LPCVD (TCO1200) vacuum setup with the aid of gasdistributing tubes is proposed. The thickness nonuniformity of the deposition procedure is decreased from 15.2 to 11.4% to improve uniformity of the resistance of the front TCO and light-scattering factor of TFSM. In addition, the number of P1 laser scribes with inadmissible resistance of insulation (less than 2 M$\Omega$) is decreased by a factor of 7. A decrease in the amount of melt at the P1 scribe edges leads to an increase in the TFSM shunting resistance by 56 $\Omega$. The TFSM output power is increased by 0.4 W due to improvement of parameters of the front TCO related to application of gas-distributing tubes.
Received: 22.05.2017
English version:
Technical Physics, 2018, Volume 63, Issue 4, Pages 557–562
DOI: https://doi.org/10.1134/S1063784218040102
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: F. S. Egorov, A. V. Kukin, E. I. Terukov, A. S. Titov, “Improved laser scribing of transparent conductive oxide for fabrication of thin-film solar module”, Zhurnal Tekhnicheskoi Fiziki, 88:4 (2018), 572–577; Tech. Phys., 63:4 (2018), 557–562
Citation in format AMSBIB
\Bibitem{EgoKukTer18}
\by F.~S.~Egorov, A.~V.~Kukin, E.~I.~Terukov, A.~S.~Titov
\paper Improved laser scribing of transparent conductive oxide for fabrication of thin-film solar module
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2018
\vol 88
\issue 4
\pages 572--577
\mathnet{http://mi.mathnet.ru/jtf5943}
\crossref{https://doi.org/10.21883/JTF.2018.04.45726.2346}
\elib{https://elibrary.ru/item.asp?id=32740039}
\transl
\jour Tech. Phys.
\yr 2018
\vol 63
\issue 4
\pages 557--562
\crossref{https://doi.org/10.1134/S1063784218040102}
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    • This publication is cited in the following 1 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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