Zhurnal Tekhnicheskoi Fiziki
RUS  ENG    JOURNALS   PEOPLE   ORGANISATIONS   CONFERENCES   SEMINARS   VIDEO LIBRARY   PACKAGE AMSBIB  
General information
Latest issue
Archive
Guidelines for authors

Search papers
Search references

RSS
Latest issue
Current issues
Archive issues
What is RSS


Zhurnal Tekhnicheskoi Fiziki:
Year:
Volume:
Issue:
Page:
Find




Personal entry:
Login:
Password:
Save password
Enter
Forgotten password?
Register

Zhurnal Tekhnicheskoi Fiziki, 2018, Volume 88, Issue 5, Pages 722–732
DOI: https://doi.org/10.21883/JTF.2018.05.45901.2243 (Mi jtf5920) 		 
This article is cited in 4 scientific papers (total in 4 papers)

Solids

Analysis of the Mo/Mo nanocrystalline optical coating obtained with the aid of simultaneous deposition and ion sputtering

A. V. Rogovab, Yu. V. Martynenkoac, Yu. V. Kapustina, S. S. Fanchenkoa, N. E. Belovaa

a National Research Centre "Kurchatov Institute", Moscow
b International Fusion Project Coordinating Centre, Moscow, Russia
c National Engineering Physics Institute "MEPhI", Moscow
Full-text PDF (706 kB) Citations (4)
DOI: https://doi.org/10.21883/JTF.2018.05.45901.2243
Abstract: Structure, optical properties, and resistance to sputtering are studied for a reflecting Mo-coating that is fabricated using magnetron deposition with simultaneous low-energy ion sputtering at the deposition rate that is higher than the etching rate. A Mo-polycrystalline mirror is used as a substrate. It is shown that the coating exhibits textured nanocrystalline structure with a relatively low spread of crystallite sizes and high resistance to sputtering. It is also demonstrated that the spectral reflection coefficient of such a Mo-coating differs from the spectral reflection coefficient of polycrystalline and single-crystalline Mo and the difference results from the effect of the structure of coating on its optical properties. A theoretical model of the coating formation is proposed.
Received: 14.03.2017
Revised: 03.11.2017
English version:
Technical Physics, 2018, Volume 63, Issue 5, Pages 700–710
DOI: https://doi.org/10.1134/S1063784218050195
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. V. Rogov, Yu. V. Martynenko, Yu. V. Kapustin, S. S. Fanchenko, N. E. Belova, “Analysis of the Mo/Mo nanocrystalline optical coating obtained with the aid of simultaneous deposition and ion sputtering”, Zhurnal Tekhnicheskoi Fiziki, 88:5 (2018), 722–732; Tech. Phys., 63:5 (2018), 700–710
Citation in format AMSBIB
\Bibitem{RogMarKap18}
\by A.~V.~Rogov, Yu.~V.~Martynenko, Yu.~V.~Kapustin, S.~S.~Fanchenko, N.~E.~Belova
\paper Analysis of the Mo/Mo nanocrystalline optical coating obtained with the aid of simultaneous deposition and ion sputtering
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2018
\vol 88
\issue 5
\pages 722--732
\mathnet{http://mi.mathnet.ru/jtf5920}
\crossref{https://doi.org/10.21883/JTF.2018.05.45901.2243}
\elib{https://elibrary.ru/item.asp?id=32740063}
\transl
\jour Tech. Phys.
\yr 2018
\vol 63
\issue 5
\pages 700--710
\crossref{https://doi.org/10.1134/S1063784218050195}
Linking options:
  • https://www.mathnet.ru/eng/jtf5920
  • https://www.mathnet.ru/eng/jtf/v88/i5/p722
    • This publication is cited in the following 4 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    		Zhurnal Tekhnicheskoi Fiziki Zhurnal Tekhnicheskoi Fiziki
    Statistics & downloads:
    Abstract page:29
    Full-text PDF :9
     
      Contact us:
    		  Terms of Use  Registration to the website  Logotypes © Steklov Mathematical Institute RAS, 2024