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This article is cited in 2 scientific papers (total in 2 papers)
Optics
Microturbines formed with the aid of direct laser recording on photoresist
R. V. Skidanovab, O. Yu. Moiseevab, S. V. Ganchevskayaab a Image Processing Systems Institute, Russian Academy of Sciences, Samara
b Samara State Aerospace University
Abstract:
A method for fabrication of mechanical elements (microturbines) that receive torque from vortex optical beams is proposed. Experimental results on fabrication of multiple microturbines are presented. Shapes of the microturbines are measured using an optical microscope, ZYGO white-light interferometer, and electron microscope.
Received: 09.03.2016
Citation:
R. V. Skidanov, O. Yu. Moiseev, S. V. Ganchevskaya, “Microturbines formed with the aid of direct laser recording on photoresist”, Zhurnal Tekhnicheskoi Fiziki, 88:6 (2018), 888–891; Tech. Phys., 63:6 (2018), 862–865
Linking options:
https://www.mathnet.ru/eng/jtf5898 https://www.mathnet.ru/eng/jtf/v88/i6/p888
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Abstract page: | 36 | Full-text PDF : | 24 |
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