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Zhurnal Tekhnicheskoi Fiziki, 2018, Volume 88, Issue 6, Pages 888–891
DOI: https://doi.org/10.21883/JTF.2018.06.46021.1795 (Mi jtf5898) 		 
This article is cited in 2 scientific papers (total in 2 papers)

Optics

Microturbines formed with the aid of direct laser recording on photoresist

R. V. Skidanovab, O. Yu. Moiseevab, S. V. Ganchevskayaab

a Image Processing Systems Institute, Russian Academy of Sciences, Samara
b Samara State Aerospace University
Full-text PDF (888 kB) Citations (2)
DOI: https://doi.org/10.21883/JTF.2018.06.46021.1795
Abstract: A method for fabrication of mechanical elements (microturbines) that receive torque from vortex optical beams is proposed. Experimental results on fabrication of multiple microturbines are presented. Shapes of the microturbines are measured using an optical microscope, ZYGO white-light interferometer, and electron microscope.
Funding agency Grant number
Ministry of Education and Science of the Russian Federation 3.3025.2017/4.6
Received: 09.03.2016
English version:
Technical Physics, 2018, Volume 63, Issue 6, Pages 862–865
DOI: https://doi.org/10.1134/S1063784218060208
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: R. V. Skidanov, O. Yu. Moiseev, S. V. Ganchevskaya, “Microturbines formed with the aid of direct laser recording on photoresist”, Zhurnal Tekhnicheskoi Fiziki, 88:6 (2018), 888–891; Tech. Phys., 63:6 (2018), 862–865
Citation in format AMSBIB
\Bibitem{SkiMoiGan18}
\by R.~V.~Skidanov, O.~Yu.~Moiseev, S.~V.~Ganchevskaya
\paper Microturbines formed with the aid of direct laser recording on photoresist
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2018
\vol 88
\issue 6
\pages 888--891
\mathnet{http://mi.mathnet.ru/jtf5898}
\crossref{https://doi.org/10.21883/JTF.2018.06.46021.1795}
\elib{https://elibrary.ru/item.asp?id=34982858}
\transl
\jour Tech. Phys.
\yr 2018
\vol 63
\issue 6
\pages 862--865
\crossref{https://doi.org/10.1134/S1063784218060208}
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    • This publication is cited in the following 2 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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