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Zhurnal Tekhnicheskoi Fiziki, 2018, Volume 88, Issue 6, Pages 874–876
DOI: https://doi.org/10.21883/JTF.2018.06.46033.2489 (Mi jtf5895) 		 
Solid-State Electronics

Combined technology fabrication of spin-valve magnetoresistive elements and micromagnets

V. V. Amelichevab, P. A. Belyakovab, D. V. Kostyukab, D. V. Vasilyevab, E. P. Orlovab, Yu. V. Kazakovb, S. I. Kasatkinc, A. I. Krikunovd

a LLC Scientific-Production Enterprise "Technology", Zelenograd, Moscow, Russia
b Research and Production Complex "Technological Center" MIET, Zelenograd, Moscow, Russia
c V. A. Trapeznikov Institute of Control Sciences of Russian Academy of Sciences, Moscow
d "Fotron-Auto" Scientific Manufacture Enterprise, Moscow
Full-text PDF (187 kB)
DOI: https://doi.org/10.21883/JTF.2018.06.46033.2489
Abstract: We present the research results of the fabrication technology of magnetoresistive (MR) elements based on the multilayer spin-valve magnetoresistive (SVMR) Ta–FeNiCo–CoFe–Cu–CoFe–FeNiCo–FeMn–Та nanostructures and CoNi micromagnets for the construction of digital galvanic interchanges and the magnetic field sensors. The results of experimental studies of test elements based on multilayer SVMR nanostructures with an MR effect from 7 to 8% and films of magnetically hard materials with a coercive force of up to 95 Oe formed on a single silicon die are presented.
Funding agency Grant number
Ministry of Education and Science of the Russian Federation 14.427.12.0002
Received: 21.09.2017
English version:
Technical Physics, 2018, Volume 63, Issue 6, Pages 848–850
DOI: https://doi.org/10.1134/S1063784218060038
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: V. V. Amelichev, P. A. Belyakov, D. V. Kostyuk, D. V. Vasilyev, E. P. Orlov, Yu. V. Kazakov, S. I. Kasatkin, A. I. Krikunov, “Combined technology fabrication of spin-valve magnetoresistive elements and micromagnets”, Zhurnal Tekhnicheskoi Fiziki, 88:6 (2018), 874–876; Tech. Phys., 63:6 (2018), 848–850
Citation in format AMSBIB
\Bibitem{AmeBelKos18}
\by V.~V.~Amelichev, P.~A.~Belyakov, D.~V.~Kostyuk, D.~V.~Vasilyev, E.~P.~Orlov, Yu.~V.~Kazakov, S.~I.~Kasatkin, A.~I.~Krikunov
\paper Combined technology fabrication of spin-valve magnetoresistive elements and micromagnets
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2018
\vol 88
\issue 6
\pages 874--876
\mathnet{http://mi.mathnet.ru/jtf5895}
\crossref{https://doi.org/10.21883/JTF.2018.06.46033.2489}
\elib{https://elibrary.ru/item.asp?id=34982855}
\transl
\jour Tech. Phys.
\yr 2018
\vol 63
\issue 6
\pages 848--850
\crossref{https://doi.org/10.1134/S1063784218060038}
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