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This article is cited in 4 scientific papers (total in 4 papers)
Physical science of materials
Manufacturing of sputtering composite targets containing phases of Co$_{2}$FeSi or Co$_{2}$MnSi Heusler alloy
E. S. Demidov, V. V. Sdobnyakov, G. V. Vazenmiller, Yu. I. Chigirinskii, Yu. A. Dudin, V. P. Lesnikov, V. N. Trushin, M. S. Boldin, O. A. Belkin, A. A. Bobrov, N. V. Sakharov National Research Lobachevsky State University of Nizhny Novgorod
Abstract:
The paper presents a method for manufacturing mechanically strong sputtering composite targets containing the phase of the Co$_{2}$FeSi or Co$_{2}$MnSi Heusler alloy of the stoichiometric composition, which can be used for fabrication of spin electronic devices by high-frequency magnetron deposition and pulsed laser deposition of thin films.
Received: 23.10.2017
Citation:
E. S. Demidov, V. V. Sdobnyakov, G. V. Vazenmiller, Yu. I. Chigirinskii, Yu. A. Dudin, V. P. Lesnikov, V. N. Trushin, M. S. Boldin, O. A. Belkin, A. A. Bobrov, N. V. Sakharov, “Manufacturing of sputtering composite targets containing phases of Co$_{2}$FeSi or Co$_{2}$MnSi Heusler alloy”, Zhurnal Tekhnicheskoi Fiziki, 88:7 (2018), 1032–1035; Tech. Phys., 63:7 (2018), 1002–1005
Linking options:
https://www.mathnet.ru/eng/jtf5865 https://www.mathnet.ru/eng/jtf/v88/i7/p1032
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