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Zhurnal Tekhnicheskoi Fiziki, 2018, Volume 88, Issue 10, Pages 1502–1505
DOI: https://doi.org/10.21883/JTF.2018.10.46492.2611 (Mi jtf5791) 		 
This article is cited in 4 scientific papers (total in 4 papers)

Theoretical and Mathematical Physics

Calculation of self-sputtering yield under ion bombardment of solids: computer simulation and theory

A. I. Tolmacheva, L. Forlanob

a Russian New University, Moscow
b Universita della Calabria, Cosenza, Italia
Full-text PDF (101 kB) Citations (4)
DOI: https://doi.org/10.21883/JTF.2018.10.46492.2611
Abstract: We developed a computer simulation program for investigation of solid self-sputtering under ion bombardment. The program is based on binary collision approximation, truncated Coulomb potential, and the model of local inelastic losses proportional to energy. As a result of simulation, the self-sputtering yield is calculated as a function of atomic number and ion energy. To verify the cascade simulation code, we created a self-sputtering theory for the case of hard sphere potential. Simulation results show good agreement with both experimental data and theory.
Keywords: Self-sputtering Yield, Truncated Coulomb Potential, Hard Sphere Potential, Binary Collision Approximation, Inelastic Energy Loss.
Received: 25.12.2017
English version:
Technical Physics, 2018, Volume 63, Issue 10, Pages 1455–1458
DOI: https://doi.org/10.1134/S1063784218100225
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. I. Tolmachev, L. Forlano, “Calculation of self-sputtering yield under ion bombardment of solids: computer simulation and theory”, Zhurnal Tekhnicheskoi Fiziki, 88:10 (2018), 1502–1505; Tech. Phys., 63:10 (2018), 1455–1458
Citation in format AMSBIB
\Bibitem{TolFor18}
\by A.~I.~Tolmachev, L.~Forlano
\paper Calculation of self-sputtering yield under ion bombardment of solids: computer simulation and theory
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2018
\vol 88
\issue 10
\pages 1502--1505
\mathnet{http://mi.mathnet.ru/jtf5791}
\crossref{https://doi.org/10.21883/JTF.2018.10.46492.2611}
\elib{https://elibrary.ru/item.asp?id=36904488}
\transl
\jour Tech. Phys.
\yr 2018
\vol 63
\issue 10
\pages 1455--1458
\crossref{https://doi.org/10.1134/S1063784218100225}
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    • This publication is cited in the following 4 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    		Zhurnal Tekhnicheskoi Fiziki Zhurnal Tekhnicheskoi Fiziki
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