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Plasma
Probe technique for measuring the Bohm coefficient, space-charge probe layer thickness, and ion mass
P. E. Masherov, V. A. Ryabyi State Research Institute of Apply Mechanics and Electrodynamics of MAI
Abstract:
We propose measuring the Bohm coefficient, thickness of the space-charge probe layer, and ion mass in Maxwellian low-pressure plasma based on the results of standard probe measurements using the Bohm effect, Boltzmann law, and “3/2” law in the case of their validity for the studied plasma. This possibility was implemented by comprehensive probe diagnostics of high-frequency xenon plasma of an induction discharge at a pressure of 2 mTorr. Analysis of the obtained results showed that these laws and the Bohm effect are valid with “engineering” accuracy, which made it possible to find Bohm coefficient $C_{\operatorname{BCyl}}\approx$ 1.23 for a cylindrical probe, which served as the basis of the proposed method.
Received: 03.10.2016 Revised: 26.04.2018
Citation:
P. E. Masherov, V. A. Ryabyi, “Probe technique for measuring the Bohm coefficient, space-charge probe layer thickness, and ion mass”, Zhurnal Tekhnicheskoi Fiziki, 88:12 (2018), 1801–1806; Tech. Phys., 63:12 (2018), 1743–1748
Linking options:
https://www.mathnet.ru/eng/jtf5740 https://www.mathnet.ru/eng/jtf/v88/i12/p1801
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Abstract page: | 35 | Full-text PDF : | 28 |
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