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Zhurnal Tekhnicheskoi Fiziki, 2019, Volume 89, Issue 4, Pages 620–626
DOI: https://doi.org/10.21883/JTF.2019.04.47323.165-18 (Mi jtf5653) 		 
This article is cited in 3 scientific papers (total in 3 papers)

Physical electronics

Model for thermal oxidation of silicon

A. V. Fadeeva, Yu. N. Devyatkob

a Insitute of Physics and Technology, Institution of Russian Academy of Sciences, Moscow
b National Engineering Physics Institute "MEPhI", Moscow
Full-text PDF (148 kB) Citations (3)
DOI: https://doi.org/10.21883/JTF.2019.04.47323.165-18
Abstract: Nanometer-thick silicon oxide films are needed for miniaturization and increase in the working rate of electronic devices. Interpretation of the initial stages of silicon oxidation is necessary for fabrication of such structures. A theoretical model of the thermal oxidation of thin silicon monolayers that takes into account an increase in the stress in the transition (oxide–substrate) layer due to oxygen accumulation therein is proposed.
Funding agency Grant number
Ministry of Education and Science of the Russian Federation 0066-2019-0004
Received: 26.04.2018
Revised: 28.09.2018
English version:
Technical Physics, 2019, Volume 64, Issue 4, Pages 575–581
DOI: https://doi.org/10.1134/S1063784219040108
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. V. Fadeev, Yu. N. Devyatko, “Model for thermal oxidation of silicon”, Zhurnal Tekhnicheskoi Fiziki, 89:4 (2019), 620–626; Tech. Phys., 64:4 (2019), 575–581
Citation in format AMSBIB
\Bibitem{FadDev19}
\by A.~V.~Fadeev, Yu.~N.~Devyatko
\paper Model for thermal oxidation of silicon
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2019
\vol 89
\issue 4
\pages 620--626
\mathnet{http://mi.mathnet.ru/jtf5653}
\crossref{https://doi.org/10.21883/JTF.2019.04.47323.165-18}
\elib{https://elibrary.ru/item.asp?id=37643966}
\transl
\jour Tech. Phys.
\yr 2019
\vol 64
\issue 4
\pages 575--581
\crossref{https://doi.org/10.1134/S1063784219040108}
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    • This publication is cited in the following 3 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    		Zhurnal Tekhnicheskoi Fiziki Zhurnal Tekhnicheskoi Fiziki
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