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Zhurnal Tekhnicheskoi Fiziki, 2019, Volume 89, Issue 9, Pages 1412–1419
DOI: https://doi.org/10.21883/JTF.2019.09.48068.43-19 (Mi jtf5520) 		 
This article is cited in 8 scientific papers (total in 8 papers)

Physics of nanostructures

Investigation of a contamination film formed by the electron beam irradiation

K. N. Orekhova, Yu. M. Serov, P. A. Dementev, E. V. Ivanova, V. A. Kravez, V. P. Usacheva, M. V. Zamoryanskaya

Ioffe Institute, St. Petersburg
Full-text PDF (777 kB) Citations (8)
DOI: https://doi.org/10.21883/JTF.2019.09.48068.43-19
Abstract: In the study of materials on electron probe devices in the field of action of the electron beam, a contaminating hydrocarbon film is formed, which affects the experimental results. In this paper, we have studied the influence of a contamination film on carbon-film-coated dielectrics on the intensity of cathodoluminescence and characteristic X-ray lines. The absorption coefficient of the contamination film in the visible and UV ranges has been determined. Filming mechanisms at different parameters of the electron beam have been discussed.
Keywords: contamination, hydrocarbon film, SEM, cathodoluminescence, X-ray microanalysis.
Funding agency Grant number
Russian Foundation for Basic Research 18-32-00804 мол_а
This study was financially supported by the Russian Foundation for Basic Research, project no. 18-32-00804mol_a.
Received: 07.02.2019
Revised: 19.03.2019
Accepted: 27.03.2019
English version:
Technical Physics, 2019, Volume 64, Issue 9, Pages 1336–1342
DOI: https://doi.org/10.1134/S1063784219090123
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: K. N. Orekhova, Yu. M. Serov, P. A. Dementev, E. V. Ivanova, V. A. Kravez, V. P. Usacheva, M. V. Zamoryanskaya, “Investigation of a contamination film formed by the electron beam irradiation”, Zhurnal Tekhnicheskoi Fiziki, 89:9 (2019), 1412–1419; Tech. Phys., 64:9 (2019), 1336–1342
Citation in format AMSBIB
\Bibitem{OreSerDem19}
\by K.~N.~Orekhova, Yu.~M.~Serov, P.~A.~Dementev, E.~V.~Ivanova, V.~A.~Kravez, V.~P.~Usacheva, M.~V.~Zamoryanskaya
\paper Investigation of a contamination film formed by the electron beam irradiation
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2019
\vol 89
\issue 9
\pages 1412--1419
\mathnet{http://mi.mathnet.ru/jtf5520}
\crossref{https://doi.org/10.21883/JTF.2019.09.48068.43-19}
\elib{https://elibrary.ru/item.asp?id=41130905}
\transl
\jour Tech. Phys.
\yr 2019
\vol 64
\issue 9
\pages 1336--1342
\crossref{https://doi.org/10.1134/S1063784219090123}
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    • This publication is cited in the following 8 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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