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Zhurnal Tekhnicheskoi Fiziki, 2019, Volume 89, Issue 11, Pages 1789–1794
DOI: https://doi.org/10.21883/JTF.2019.11.48346.115-19 (Mi jtf5476) 		 
This article is cited in 2 scientific papers (total in 2 papers)

XXIII International Symposium on Nanophysics and Nanoelectronics, Nizhny Novgorod, March 11-14, 2019

Measurement error of interferometers with diffraction reference wave

A. A. Akhsakhalyan, D. A. Gavrilin, I. V. Malyshev, N. N. Salashchenko, M. N. Toropov, B. A. Ulasevich, N. N. Tsybin, N. I. Chkhalo

Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod
Full-text PDF (539 kB) Citations (2)
DOI: https://doi.org/10.21883/JTF.2019.11.48346.115-19
Abstract: An experimental setup and results on aberration of sources of a reference spherical wave (SRSW) based on a single-mode optical fiber with a subwavelength output aperture obtained with the aid of an optical part of recording system (OPRS) are presented. SRSW and OPRS are developed for referenceless interferometer with diffraction reference wave. Methods for minimization of the measurement error are proposed. The SRSW and OPRS provide subnanometer measurement accuracy for optics. An increase in the measurement accuracy of the interferometer to a picometer level is discussed.
Keywords: interferometry, aberration, diffraction reference wave, optical fiber.
Funding agency Grant number
Ministry of Education and Science of the Russian Federation 075-02-2018-182
This work was supported by the Ministry of Education and Science of the Russian Federation (contract no. 075-02-2018-182 (RFMEFI60418X0202)).
Received: 28.03.2019
Revised: 28.03.2019
Accepted: 15.04.2019
English version:
Technical Physics, 2019, Volume 64, Issue 11, Pages 1698–1703
DOI: https://doi.org/10.1134/S1063784219110021
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. A. Akhsakhalyan, D. A. Gavrilin, I. V. Malyshev, N. N. Salashchenko, M. N. Toropov, B. A. Ulasevich, N. N. Tsybin, N. I. Chkhalo, “Measurement error of interferometers with diffraction reference wave”, Zhurnal Tekhnicheskoi Fiziki, 89:11 (2019), 1789–1794; Tech. Phys., 64:11 (2019), 1698–1703
Citation in format AMSBIB
\Bibitem{AkhGavMal19}
\by A.~A.~Akhsakhalyan, D.~A.~Gavrilin, I.~V.~Malyshev, N.~N.~Salashchenko, M.~N.~Toropov, B.~A.~Ulasevich, N.~N.~Tsybin, N.~I.~Chkhalo
\paper Measurement error of interferometers with diffraction reference wave
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2019
\vol 89
\issue 11
\pages 1789--1794
\mathnet{http://mi.mathnet.ru/jtf5476}
\crossref{https://doi.org/10.21883/JTF.2019.11.48346.115-19}
\elib{https://elibrary.ru/item.asp?id=41300877}
\transl
\jour Tech. Phys.
\yr 2019
\vol 64
\issue 11
\pages 1698--1703
\crossref{https://doi.org/10.1134/S1063784219110021}
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    • This publication is cited in the following 2 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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