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Zhurnal Tekhnicheskoi Fiziki, 2019, Volume 89, Issue 11, Pages 1783–1788
DOI: https://doi.org/10.21883/JTF.2019.11.48345.136-19 (Mi jtf5475) 		 
This article is cited in 3 scientific papers (total in 3 papers)

XXIII International Symposium on Nanophysics and Nanoelectronics, Nizhny Novgorod, March 11-14, 2019

Influence of thermal annealing on the properties of multilayer Mo/Be mirrors

R. M. Smertina, S. A. Garakhina, S. Yu. Zueva, A. N. Nechaia, V. N. Polkovnikova, N. N. Salashchenkoa, M. V. Svechnikova, M. G. Sertsub, A. Sokolovb, N. I. Chkhaloa, F. Schäfersb, P. A. Yunina

a Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod
b Helmgoltz-Zentrum Berlin, Berlin, Germany
Full-text PDF (490 kB) Citations (3)
DOI: https://doi.org/10.21883/JTF.2019.11.48345.136-19
Abstract: The influence of thermal action on X-ray optics performance and structure of films and transition regions in multilayer Mo/Be mirrors optimized for a reflection maximum in the interval 11.2–11.4 nm at normal incidence has been considered. The annealing temperature reached 300$^{\circ}$C and the annealing time was 1 and 4 h. It has been shown that after thermal annealing in vacuum for 1 h at 300$^{\circ}$C, the reflection coefficient rises; however, when the annealing time grows to 4 h, it drops. Grains in molybdenum films become finer, and the profiles of transition regions change from exponential to linear. The period of multilayer mirrors has remained the same under all annealing conditions.
Funding agency Grant number
Russian Foundation for Basic Research 17-52-150006
18-02-00588
Ministry of Education and Science of the Russian Federation 0035 2014-0204
This study was supported by the Russian Foundation for Basic Research (grant nos. 17-52-150006 and 18-02-00588) and was done in accordance with state task no. 0035 2014-0204 for the Institute of Physics of Microstructures, Russian Academy of Sciences, using equipment from the Common Use Center, Institute of Physics of Microstructures.
Received: 28.03.2019
Revised: 28.03.2019
Accepted: 15.04.2019
English version:
Technical Physics, 2019, Volume 64, Issue 11, Pages 1692–1697
DOI: https://doi.org/10.1134/S1063784219110252
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: R. M. Smertin, S. A. Garakhin, S. Yu. Zuev, A. N. Nechai, V. N. Polkovnikov, N. N. Salashchenko, M. V. Svechnikov, M. G. Sertsu, A. Sokolov, N. I. Chkhalo, F. Schäfers, P. A. Yunin, “Influence of thermal annealing on the properties of multilayer Mo/Be mirrors”, Zhurnal Tekhnicheskoi Fiziki, 89:11 (2019), 1783–1788; Tech. Phys., 64:11 (2019), 1692–1697
Citation in format AMSBIB
\Bibitem{SmeGarZue19}
\by R.~M.~Smertin, S.~A.~Garakhin, S.~Yu.~Zuev, A.~N.~Nechai, V.~N.~Polkovnikov, N.~N.~Salashchenko, M.~V.~Svechnikov, M.~G.~Sertsu, A.~Sokolov, N.~I.~Chkhalo, F.~Sch\"afers, P.~A.~Yunin
\paper Influence of thermal annealing on the properties of multilayer Mo/Be mirrors
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2019
\vol 89
\issue 11
\pages 1783--1788
\mathnet{http://mi.mathnet.ru/jtf5475}
\crossref{https://doi.org/10.21883/JTF.2019.11.48345.136-19}
\elib{https://elibrary.ru/item.asp?id=41300875}
\transl
\jour Tech. Phys.
\yr 2019
\vol 64
\issue 11
\pages 1692--1697
\crossref{https://doi.org/10.1134/S1063784219110252}
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    • This publication is cited in the following 3 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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