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Zhurnal Tekhnicheskoi Fiziki, 2019, Volume 89, Issue 11, Pages 1779–1782
DOI: https://doi.org/10.21883/JTF.2019.11.48344.130-19 (Mi jtf5474) 		 
This article is cited in 4 scientific papers (total in 4 papers)

XXIII International Symposium on Nanophysics and Nanoelectronics, Nizhny Novgorod, March 11-14, 2019

Influence of beryllium barrier layers on the properties of Mo/Si multilayer mirrors

S. Yu. Zueva, R. S. Pleshkova, V. N. Polkovnikova, N. N. Salashchenkoa, M. V. Svechnikova, N. I. Chkhaloa, F. Schäfersb, M. G. Sertsub, A. Sokolovb

a Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod
b Helmholtz-Zentrum Berlin, Berlin, Germany
Full-text PDF (199 kB) Citations (4)
DOI: https://doi.org/10.21883/JTF.2019.11.48344.130-19
Abstract: The performance of multilayer Mo/Si mirrors with B$_{4}$C and Be spacers near a wavelength of 13.5 nm has been studied. It has been shown that four-component Mo/Si/B$_{4}$C mirrors outperform Mo/Si and Mo/Si/B$_{4}$C mirrors in reflection coefficient by 2.0 and 1.3%, respectively. In addition, Mo/Si mirrors offer the widest transmission band width at half maximum ($\Delta\lambda_{1/2}$ = 0.535 nm). An explanation for these findings has been given.
Keywords: X-radiation, multilayer mirrors, magnetron sputtering.
Funding agency Grant number
Russian Foundation for Basic Research 18-02-00588
18-02-00173
18-32-00173
19-02-00081
17-52-150006
This study was supported by the Russian Foundation for Basic Research (grant nos. 18-02-00588, 18-02-00173, 18-32-00173, 19-02-00081, 17-52-150006) and program no. 0035-2018-0011 of the Russian Academy of Sciences.
Received: 28.03.2019
Revised: 28.03.2019
Accepted: 15.04.2019
English version:
Technical Physics, 2019, Volume 64, Issue 11, Pages 1688–1691
DOI: https://doi.org/10.1134/S1063784219110318
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: S. Yu. Zuev, R. S. Pleshkov, V. N. Polkovnikov, N. N. Salashchenko, M. V. Svechnikov, N. I. Chkhalo, F. Schäfers, M. G. Sertsu, A. Sokolov, “Influence of beryllium barrier layers on the properties of Mo/Si multilayer mirrors”, Zhurnal Tekhnicheskoi Fiziki, 89:11 (2019), 1779–1782; Tech. Phys., 64:11 (2019), 1688–1691
Citation in format AMSBIB
\Bibitem{ZuePlePol19}
\by S.~Yu.~Zuev, R.~S.~Pleshkov, V.~N.~Polkovnikov, N.~N.~Salashchenko, M.~V.~Svechnikov, N.~I.~Chkhalo, F.~Sch\"afers, M.~G.~Sertsu, A.~Sokolov
\paper Influence of beryllium barrier layers on the properties of Mo/Si multilayer mirrors
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2019
\vol 89
\issue 11
\pages 1779--1782
\mathnet{http://mi.mathnet.ru/jtf5474}
\crossref{https://doi.org/10.21883/JTF.2019.11.48344.130-19}
\elib{https://elibrary.ru/item.asp?id=41300874}
\transl
\jour Tech. Phys.
\yr 2019
\vol 64
\issue 11
\pages 1688--1691
\crossref{https://doi.org/10.1134/S1063784219110318}
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    • This publication is cited in the following 4 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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