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Zhurnal Tekhnicheskoi Fiziki, 2019, Volume 89, Issue 11, Pages 1774–1778
DOI: https://doi.org/10.21883/JTF.2019.11.48343.129-19 (Mi jtf5473) 		 
This article is cited in 2 scientific papers (total in 2 papers)

XXIII International Symposium on Nanophysics and Nanoelectronics, Nizhny Novgorod, March 11-14, 2019

Multilayer Ag/Y mirrors for the spectral range of 9–11 nm

D. S. Kvashennikovab, S. Yu. Zueva, V. N. Polkovnikova, N. N. Salashchenkoa, N. I. Chkhaloa, F. Delmottec, E. Meltchakovc

a Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod
b Lobachevsky State University of Nizhny Novgorod
c Laboratoire Charles Fabry, Institut d'Optique Graduate School, Palaiseau, France
Full-text PDF (138 kB) Citations (2)
DOI: https://doi.org/10.21883/JTF.2019.11.48343.129-19
Abstract: Multilayer Ag/Y mirrors intended for the spectral range of 9–11 nm have been investigated. The parameters of mirrors, specifically, the thicknesses of transition layers, have been determined. The efficiency of B$_4$C and Si barrier layers has been demonstrated. It has been shown that the properties of structures like Ag/Y and Ag/Y with B$_4$C and Si barriers layers have poor temporal stability. The highest reflection coefficient of 18% at a wavelength of 9.34 nm, has been observed for the Ag/Si/Y structure. The same structure has the best temporal stability.
Funding agency Grant number
Ministry of Education and Science of the Russian Federation 0035-2014-0204
Russian Foundation for Basic Research 19-02-00081
17-52-150006
1567
This study was performed in accordance with State Task no. 0035-2014-0204 for the Institute of Physics of Microstructures. It was partially supported by the Russian Foundation for Basic Research (grant nos. 19-02-00081 and 17-52-150006) and a joint Russian–French CNRC/RFBR grant (PRC 2016, no. 1567).
Received: 28.03.2019
Revised: 28.03.2019
Accepted: 15.04.2019
English version:
Technical Physics, 2019, Volume 64, Issue 11, Pages 1684–1687
DOI: https://doi.org/10.1134/S1063784219110161
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: D. S. Kvashennikov, S. Yu. Zuev, V. N. Polkovnikov, N. N. Salashchenko, N. I. Chkhalo, F. Delmotte, E. Meltchakov, “Multilayer Ag/Y mirrors for the spectral range of 9–11 nm”, Zhurnal Tekhnicheskoi Fiziki, 89:11 (2019), 1774–1778; Tech. Phys., 64:11 (2019), 1684–1687
Citation in format AMSBIB
\Bibitem{KvaZuePol19}
\by D.~S.~Kvashennikov, S.~Yu.~Zuev, V.~N.~Polkovnikov, N.~N.~Salashchenko, N.~I.~Chkhalo, F.~Delmotte, E.~Meltchakov
\paper Multilayer Ag/Y mirrors for the spectral range of 9--11 nm
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2019
\vol 89
\issue 11
\pages 1774--1778
\mathnet{http://mi.mathnet.ru/jtf5473}
\crossref{https://doi.org/10.21883/JTF.2019.11.48343.129-19}
\elib{https://elibrary.ru/item.asp?id=41300873}
\transl
\jour Tech. Phys.
\yr 2019
\vol 64
\issue 11
\pages 1684--1687
\crossref{https://doi.org/10.1134/S1063784219110161}
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    • This publication is cited in the following 2 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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