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This article is cited in 7 scientific papers (total in 7 papers)
XXIII International Symposium on Nanophysics and Nanoelectronics, Nizhny Novgorod, March 11-14, 2019
Optimization of composition, synthesis, and study of broadband multilayer mirrors for the EUV spectral range
M. M. Baryshevaa, S. A. Garakhina, S. Yu. Zueva, V. N. Polkovnikova, N. N. Salashchenkoa, M. V. Svechnikova, R. M. Smertina, N. I. Chkhaloa, E. Meltchakovb a Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod
b Laboratoire Charles Fabry, Institut d'Optique Graduate School, Palaiseau, France
Abstract:
The article is devoted to the development, fabrication and analysis of broadband Mo/Si and Mo/Be stack-design multilayer mirrors for the wavelength ranges of 11.1-13.8, 17–21 and 28–33 nm. It is shown that for these structures smooth reflection curves can be achieved in a small number of corrections of the technological process.
Keywords:
EUV, broadband mirrors, aperiodic mirrors, stack structures, reflectometer with laser-plasma source.
Received: 28.03.2019 Revised: 28.03.2019 Accepted: 15.04.2019
Citation:
M. M. Barysheva, S. A. Garakhin, S. Yu. Zuev, V. N. Polkovnikov, N. N. Salashchenko, M. V. Svechnikov, R. M. Smertin, N. I. Chkhalo, E. Meltchakov, “Optimization of composition, synthesis, and study of broadband multilayer mirrors for the EUV spectral range”, Zhurnal Tekhnicheskoi Fiziki, 89:11 (2019), 1763–1769; Tech. Phys., 64:11 (2019), 1673–1679
Linking options:
https://www.mathnet.ru/eng/jtf5471 https://www.mathnet.ru/eng/jtf/v89/i11/p1763
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