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Zhurnal Tekhnicheskoi Fiziki, 2019, Volume 89, Issue 11, Pages 1763–1769
DOI: https://doi.org/10.21883/JTF.2019.11.48341.116-19 (Mi jtf5471) 		 
This article is cited in 7 scientific papers (total in 7 papers)

XXIII International Symposium on Nanophysics and Nanoelectronics, Nizhny Novgorod, March 11-14, 2019

Optimization of composition, synthesis, and study of broadband multilayer mirrors for the EUV spectral range

M. M. Baryshevaa, S. A. Garakhina, S. Yu. Zueva, V. N. Polkovnikova, N. N. Salashchenkoa, M. V. Svechnikova, R. M. Smertina, N. I. Chkhaloa, E. Meltchakovb

a Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod
b Laboratoire Charles Fabry, Institut d'Optique Graduate School, Palaiseau, France
Full-text PDF (965 kB) Citations (7)
DOI: https://doi.org/10.21883/JTF.2019.11.48341.116-19
Abstract: The article is devoted to the development, fabrication and analysis of broadband Mo/Si and Mo/Be stack-design multilayer mirrors for the wavelength ranges of 11.1-13.8, 17–21 and 28–33 nm. It is shown that for these structures smooth reflection curves can be achieved in a small number of corrections of the technological process.
Keywords: EUV, broadband mirrors, aperiodic mirrors, stack structures, reflectometer with laser-plasma source.
Funding agency Grant number
Russian Academy of Sciences - Federal Agency for Scientific Organizations I.1
Russian Foundation for Basic Research 18-32-00173
17-52-150006
18-32-00671
This work was supported by the Presidium of the Russian Academy of Sciences (Program “Extreme Optical Fields and Interaction with Matter”) and Russian Foundation for Basic Research (project no. 18-32-00173 (development of the Multifitting software), project no. 17-52-150006 (deposition of experimental samples), and project no. 18-32-00671 (measurement of reflectances at a wavelength of 0.154 nm).
Received: 28.03.2019
Revised: 28.03.2019
Accepted: 15.04.2019
English version:
Technical Physics, 2019, Volume 64, Issue 11, Pages 1673–1679
DOI: https://doi.org/10.1134/S1063784219110045
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: M. M. Barysheva, S. A. Garakhin, S. Yu. Zuev, V. N. Polkovnikov, N. N. Salashchenko, M. V. Svechnikov, R. M. Smertin, N. I. Chkhalo, E. Meltchakov, “Optimization of composition, synthesis, and study of broadband multilayer mirrors for the EUV spectral range”, Zhurnal Tekhnicheskoi Fiziki, 89:11 (2019), 1763–1769; Tech. Phys., 64:11 (2019), 1673–1679
Citation in format AMSBIB
\Bibitem{BarGarZue19}
\by M.~M.~Barysheva, S.~A.~Garakhin, S.~Yu.~Zuev, V.~N.~Polkovnikov, N.~N.~Salashchenko, M.~V.~Svechnikov, R.~M.~Smertin, N.~I.~Chkhalo, E.~Meltchakov
\paper Optimization of composition, synthesis, and study of broadband multilayer mirrors for the EUV spectral range
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2019
\vol 89
\issue 11
\pages 1763--1769
\mathnet{http://mi.mathnet.ru/jtf5471}
\crossref{https://doi.org/10.21883/JTF.2019.11.48341.116-19}
\elib{https://elibrary.ru/item.asp?id=41300871}
\transl
\jour Tech. Phys.
\yr 2019
\vol 64
\issue 11
\pages 1673--1679
\crossref{https://doi.org/10.1134/S1063784219110045}
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