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Zhurnal Tekhnicheskoi Fiziki, 2019, Volume 89, Issue 11, Pages 1656–1662
DOI: https://doi.org/10.21883/JTF.2019.11.48324.131-19
(Mi jtf5454)
 

XXIII International Symposium on Nanophysics and Nanoelectronics, Nizhny Novgorod, March 11-14, 2019

Emission properties of laser plasma excited on molecular-cluster carbon dioxide jets

A. N. Nechaia, A. A. Perekalovab, N. I. Chkhaloa, N. N. Salashchenkoa

a Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod
b National Research Lobachevsky State University of Nizhny Novgorod
Abstract: We report on the results of investigation of a gas-jet laser-plasma source of extreme ultraviolet radiation based on a conical supersonic nozzle. As a target, we used molecular-cluster CO$_2$ jets. Different regimes of the gas flow were obtained by varying the gas parameters at the gas inlet and the influence of these regimes on the emission and technical characteristics of the radiation source was analyzed. It has been shown experimentally that radiation emission is intensified upon an increase in the amount of clustered material in the jet.
Keywords: сlusters, laser-plasma radiation source, laser spark, extreme ultraviolet radiation.
Funding agency Grant number
Russian Science Foundation 17-12–01227
This study was supported by the Russian Science Foundation (project no. 17-12-01227).
Received: 28.03.2019
Revised: 28.03.2019
Accepted: 15.04.2019
English version:
Technical Physics, 2019, Volume 64, Issue 11, Pages 1566–1572
DOI: https://doi.org/10.1134/S1063784219110203
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. N. Nechai, A. A. Perekalov, N. I. Chkhalo, N. N. Salashchenko, “Emission properties of laser plasma excited on molecular-cluster carbon dioxide jets”, Zhurnal Tekhnicheskoi Fiziki, 89:11 (2019), 1656–1662; Tech. Phys., 64:11 (2019), 1566–1572
Citation in format AMSBIB
\Bibitem{NecPerChk19}
\by A.~N.~Nechai, A.~A.~Perekalov, N.~I.~Chkhalo, N.~N.~Salashchenko
\paper Emission properties of laser plasma excited on molecular-cluster carbon dioxide jets
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2019
\vol 89
\issue 11
\pages 1656--1662
\mathnet{http://mi.mathnet.ru/jtf5454}
\crossref{https://doi.org/10.21883/JTF.2019.11.48324.131-19}
\elib{https://elibrary.ru/item.asp?id=41300854}
\transl
\jour Tech. Phys.
\yr 2019
\vol 64
\issue 11
\pages 1566--1572
\crossref{https://doi.org/10.1134/S1063784219110203}
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