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Zhurnal Tekhnicheskoi Fiziki, 2019, Volume 89, Issue 11, Pages 1650–1655
DOI: https://doi.org/10.21883/JTF.2019.11.48323.133-19 (Mi jtf5453) 		 
This article is cited in 3 scientific papers (total in 3 papers)

XXIII International Symposium on Nanophysics and Nanoelectronics, Nizhny Novgorod, March 11-14, 2019

Simulation of local error correction of the surface shape by a low-dimensional ion beam

A. K. Chernyshevab, I. V. Malysheva, A. E. Pestova, N. I. Chkhaloa

a Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod
b Lobachevsky State University of Nizhny Novgorod
Full-text PDF (1165 kB) Citations (3)
DOI: https://doi.org/10.21883/JTF.2019.11.48323.133-19
Abstract: We propose an algorithm for solving the problem of local error correction of the surface shape by a low-dimensional ion beam. The algorithm presumes successive sampling running over protrusions relative to the average height aimed at searching for the optimal etching point satisfying the criterion for the reduction of the sum of derivative moduli on the etching spot. It is shown that the new approach makes it possible to considerably extend the range of spatial frequencies accessible to the action for a given dimension of an ion beam.
Keywords: EUV optics, surface shape, ion-beam shape correction, ion etching.
Funding agency Grant number
Russian Foundation for Basic Research 18-32-00149 мол_а
18-07-00633
Ministry of Education and Science of the Russian Federation 0035-2018-0018
This study was supported by the Russian Foundation for Basic Research (project nos. 18-32-00149mol_a and 18-07-00633) and program no. 0035-2018-0018 of the Russian Academy of Sciences.
Received: 28.03.2019
Revised: 28.03.2019
Accepted: 15.04.2019
English version:
Technical Physics, 2019, Volume 64, Issue 11, Pages 1560–1565
DOI: https://doi.org/10.1134/S1063784219110069
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. K. Chernyshev, I. V. Malyshev, A. E. Pestov, N. I. Chkhalo, “Simulation of local error correction of the surface shape by a low-dimensional ion beam”, Zhurnal Tekhnicheskoi Fiziki, 89:11 (2019), 1650–1655; Tech. Phys., 64:11 (2019), 1560–1565
Citation in format AMSBIB
\Bibitem{CheMalPes19}
\by A.~K.~Chernyshev, I.~V.~Malyshev, A.~E.~Pestov, N.~I.~Chkhalo
\paper Simulation of local error correction of the surface shape by a low-dimensional ion beam
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2019
\vol 89
\issue 11
\pages 1650--1655
\mathnet{http://mi.mathnet.ru/jtf5453}
\crossref{https://doi.org/10.21883/JTF.2019.11.48323.133-19}
\elib{https://elibrary.ru/item.asp?id=41300853}
\transl
\jour Tech. Phys.
\yr 2019
\vol 64
\issue 11
\pages 1560--1565
\crossref{https://doi.org/10.1134/S1063784219110069}
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    • This publication is cited in the following 3 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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