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Zhurnal Tekhnicheskoi Fiziki, 2019, Volume 89, Issue 12, Pages 1836–1842
DOI: https://doi.org/10.21883/JTF.2019.12.48479.137-19 (Mi jtf5427) 		 
This article is cited in 12 scientific papers (total in 12 papers)

XXIII International Symposium on Nanophysics and Nanoelectronics, Nizhny Novgorod, March 11-14, 2019

Development of technological principles for creating a system of microfocus X-ray tubes based on silicon field emission nanocathodes

N. A. Djuzheva, G. D. Demina, N. A. Filippova, I. D. Evsikova, P. Yu. Glagoleva, M. A. Makhiborodaa, N. I. Chkhalob, N. N. Salashchenkob, S. V. Filippovc, A. G. Koloskoc, E. O. Popovc, V. A. Bespalova

a National Research University of Electronic Technology
b Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod
c Ioffe Institute, St. Petersburg
Full-text PDF (878 kB) Citations (12)
DOI: https://doi.org/10.21883/JTF.2019.12.48479.137-19
Abstract: The technological prospects for the creation of a system of microfocus X-ray tubes with the use of silicon field emission of nanocathodes have been discussed. A numerical analysis of the field-emission current from a nanoscale semiconductor cathode regulated by voltage on a grid electrode has been carried out on the basis of which a scheme for controlling the elements of the matrix of field-emission cathode assemblies has been proposed. The current–voltage characteristics of silicon field emission nanocathodes have been measured. They are in good agreement with the theoretical estimates of the field-emission current. A full technological cycle of the development of elements of microfocus X-ray tubes (a set of field-emission cathode assemblies and a set of anode assemblies) has been performed. The results can be used to create systems of microfocus X-ray tubes for nanolithographic equipment of a new generation.
Funding agency Grant number
Ministry of Education and Science of the Russian Federation 14.578.21.0250
The work was performed by a group of authors, which includes N.A. Djuzhev, G.D. Demin, N.A. Filippov, I.D. Evsikov, P.Yu. Glagolev, M.A. Makhiboroda, N.I. Chkhalo, and N.N. Salashchenko, who used the equipment of the Collective Use Center Microsystem Technology and Electronic Component Base, National Research University of Electronic Technology, supported by the Ministry of Education and Science of Russia as part of project 14.578.21.0250, RFMEFI57817X0250 using the Center for National Technology Initiative Sensory.
Received: 28.03.2019
Revised: 28.03.2019
Accepted: 15.04.2019
English version:
Technical Physics, 2019, Volume 64, Issue 12, Pages 1742–1748
DOI: https://doi.org/10.1134/S1063784219120053
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: N. A. Djuzhev, G. D. Demin, N. A. Filippov, I. D. Evsikov, P. Yu. Glagolev, M. A. Makhiboroda, N. I. Chkhalo, N. N. Salashchenko, S. V. Filippov, A. G. Kolosko, E. O. Popov, V. A. Bespalov, “Development of technological principles for creating a system of microfocus X-ray tubes based on silicon field emission nanocathodes”, Zhurnal Tekhnicheskoi Fiziki, 89:12 (2019), 1836–1842; Tech. Phys., 64:12 (2019), 1742–1748
Citation in format AMSBIB
\Bibitem{DjuDemFil19}
\by N.~A.~Djuzhev, G.~D.~Demin, N.~A.~Filippov, I.~D.~Evsikov, P.~Yu.~Glagolev, M.~A.~Makhiboroda, N.~I.~Chkhalo, N.~N.~Salashchenko, S.~V.~Filippov, A.~G.~Kolosko, E.~O.~Popov, V.~A.~Bespalov
\paper Development of technological principles for creating a system of microfocus X-ray tubes based on silicon field emission nanocathodes
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2019
\vol 89
\issue 12
\pages 1836--1842
\mathnet{http://mi.mathnet.ru/jtf5427}
\crossref{https://doi.org/10.21883/JTF.2019.12.48479.137-19}
\elib{https://elibrary.ru/item.asp?id=41848216}
\transl
\jour Tech. Phys.
\yr 2019
\vol 64
\issue 12
\pages 1742--1748
\crossref{https://doi.org/10.1134/S1063784219120053}
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    • This publication is cited in the following 12 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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