Self-organization of dimensional and concentration diversity in a CN$_{x}$ : Eu$_{y}$O$_{z}$ film clusterized structure

The structure of diamond-like CN$_{x}$ : Eu$_{y}$O$_{z}$ films obtained by magnetron sputtering of a composite carbon–metal–oxide target in a nitrogen atmosphere has been examined. It has been shown that the components of the target and working atmosphere self-organize, with europia and carbon oxide entering into an intense solid-state substitution reaction to form CN$_{x}$ : Eu$_{y}$O$_{z}$ complexes. These complexes show up in fine clusters of a growing film. It was found that samples grown at an intermediate working gas pressure have a unique uniformly variable structure filled with different clusters.