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Zhurnal Tekhnicheskoi Fiziki, 2020, Volume 90, Issue 3, Pages 489–493
DOI: https://doi.org/10.21883/JTF.2020.03.48937.232-19 (Mi jtf5369) 		 
This article is cited in 6 scientific papers (total in 6 papers)

Physical electronics

Structural properties of carbon films fabricated by ion-assisted pulsed-plasma deposition

I. A. Zavidovskiy, O. A. Streletskii, O. Yu. Nischak, N. F. Savchenko, S. V. Dvoryak, A. V. Pavlikov

Lomonosov Moscow State University
Full-text PDF (458 kB) Citations (6)
DOI: https://doi.org/10.21883/JTF.2020.03.48937.232-19
Abstract: Carbon films fabricated by pulsed-plasma ion-assisted sputtering of graphite in argon and nitrogen atmosphere are studied using Raman spectroscopy, electron diffraction, and X-ray photoelectron spectroscopy. The results show that nitrogen is efficiently incorporated in the material structure, which leads to formation of oriented graphite nanoclusters the amount of which increases with an increase in the assistance energy.
Keywords: amorphous carbon, thin films, ion assistance, Raman spectroscopy, X-ray photoelectron spectroscopy.
Received: 05.06.2019
Revised: 21.09.2019
Accepted: 25.09.2019
English version:
Technical Physics, 2020, Volume 65, Issue 3, Pages 468–472
DOI: https://doi.org/10.1134/S1063784220030263
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: I. A. Zavidovskiy, O. A. Streletskii, O. Yu. Nischak, N. F. Savchenko, S. V. Dvoryak, A. V. Pavlikov, “Structural properties of carbon films fabricated by ion-assisted pulsed-plasma deposition”, Zhurnal Tekhnicheskoi Fiziki, 90:3 (2020), 489–493; Tech. Phys., 65:3 (2020), 468–472
Citation in format AMSBIB
\Bibitem{ZavStrNis20}
\by I.~A.~Zavidovskiy, O.~A.~Streletskii, O.~Yu.~Nischak, N.~F.~Savchenko, S.~V.~Dvoryak, A.~V.~Pavlikov
\paper Structural properties of carbon films fabricated by ion-assisted pulsed-plasma deposition
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2020
\vol 90
\issue 3
\pages 489--493
\mathnet{http://mi.mathnet.ru/jtf5369}
\crossref{https://doi.org/10.21883/JTF.2020.03.48937.232-19}
\elib{https://elibrary.ru/item.asp?id=42747726}
\transl
\jour Tech. Phys.
\yr 2020
\vol 65
\issue 3
\pages 468--472
\crossref{https://doi.org/10.1134/S1063784220030263}
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    • This publication is cited in the following 6 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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