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This article is cited in 1 scientific paper (total in 1 paper)
Physical science of materials
Lateral inhomogeneities of sapphire plates determined with the aid of X-ray and probe methods
V. E. Asadchikova, A. E. Blagovab, A. V. Butashina, Yu. O. Volkova, A. N. Deryabina, V. M. Kanevskiia, A. È. Muslimova, A. I. Protsenkoab, B. S. Roshchina, A. V. Targonskyab, F. N. Chukhovskiia a Institute of Cristallography Russian Academy of Sciences, Moscow
b National Research Centre "Kurchatov Institute", Moscow
Abstract:
X-ray diffractometry, X-ray profilometry, atomic-force microscopy, and sclerometer tests are employed in the study of $R$-cut plates of sapphire single crystals grown with the aid of the Kyropoulos technique and used as substrates for the silicon-on-sapphire structures. Regions with different degrees of perfection can be found even on a single plate. Mutually consistent results of the four experimental methods based on different physical principles can be used to reveal regions of structural imperfection on the surface of a plate. It is expedient to employ a complex procedure for multipoint monitoring of the parameters of plates to reduce the number of defect samples that serve as substrates in the production of electronic devices.
Keywords:
sapphire, X-ray diffraction, X-ray reflectometry, atomic-force microscopy, sclerometry.
Received: 13.12.2018 Revised: 11.07.2019 Accepted: 16.09.2019
Citation:
V. E. Asadchikov, A. E. Blagov, A. V. Butashin, Yu. O. Volkov, A. N. Deryabin, V. M. Kanevskii, A. È. Muslimov, A. I. Protsenko, B. S. Roshchin, A. V. Targonsky, F. N. Chukhovskii, “Lateral inhomogeneities of sapphire plates determined with the aid of X-ray and probe methods”, Zhurnal Tekhnicheskoi Fiziki, 90:3 (2020), 419–426; Tech. Phys., 65:3 (2020), 400–406
Linking options:
https://www.mathnet.ru/eng/jtf5357 https://www.mathnet.ru/eng/jtf/v90/i3/p419
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