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Zhurnal Tekhnicheskoi Fiziki, 2020, Volume 90, Issue 11, Pages 1922–1930
DOI: https://doi.org/10.21883/JTF.2020.11.49985.112-20 (Mi jtf5163) 		 
This article is cited in 3 scientific papers (total in 3 papers)

XXIV International Symposium Nanophysics and Nanoelectronics, Nizhny Novgorod, March 10--13, 2020
Physical electronics

Ion-beam methods for high-precision processing of optical surfaces

I. G. Zabrodin, M. V. Zorina, I. A. Kas'kov, I. V. Malyshev, M. S. Mikhailenko, A. E. Pestov, N. N. Salashchenko, A. K. Chernyshev, N. I. Chkhalo

Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod
Full-text PDF (2290 kB) Citations (3)
DOI: https://doi.org/10.21883/JTF.2020.11.49985.112-20
Abstract: Methods for high-precision processing of surface of optical elements using beams of accelerated ions are considered. Characteristics and parameters of the equipment and problems that can be solved are presented. It is shown that final correction of local shape errors is possible with the aid of small-size ion beam and axisymmetric correction/aspherization is possible using wide-aperture ion beam and ion polishing. Effective roughnesses of the surfaces of fused silica, sitall, Zerodur, and ULE$\circledR$ are obtained at spatial frequencies of $q\in$ [2.5 $\times$ 10$^{-2}$–6.0 $\times$ 10$^{1}$ $\mu$m$^{-1}$]. Examples of aspheric surfaces and aspherization profile are presented.
Funding agency Grant number
Ministry of Education and Science of the Russian Federation 075-02-2018-182
This work was carried out using the equipment of the Center for Collective Use of the IPM RAS, with the support of the Ministry of Education and Science of the Russian Federation within the framework of Agreement no. 075-02-2018-182 (RFMEFI60418X0202).
Received: 03.04.2020
Revised: 03.04.2020
Accepted: 03.04.2020
English version:
Technical Physics, 2020, Volume 65, Issue 11, Pages 1837–1845
DOI: https://doi.org/10.1134/S1063784220110274
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: I. G. Zabrodin, M. V. Zorina, I. A. Kas'kov, I. V. Malyshev, M. S. Mikhailenko, A. E. Pestov, N. N. Salashchenko, A. K. Chernyshev, N. I. Chkhalo, “Ion-beam methods for high-precision processing of optical surfaces”, Zhurnal Tekhnicheskoi Fiziki, 90:11 (2020), 1922–1930; Tech. Phys., 65:11 (2020), 1837–1845
Citation in format AMSBIB
\Bibitem{ZabZorKas20}
\by I.~G.~Zabrodin, M.~V.~Zorina, I.~A.~Kas'kov, I.~V.~Malyshev, M.~S.~Mikhailenko, A.~E.~Pestov, N.~N.~Salashchenko, A.~K.~Chernyshev, N.~I.~Chkhalo
\paper Ion-beam methods for high-precision processing of optical surfaces
\jour Zhurnal Tekhnicheskoi Fiziki
\yr 2020
\vol 90
\issue 11
\pages 1922--1930
\mathnet{http://mi.mathnet.ru/jtf5163}
\crossref{https://doi.org/10.21883/JTF.2020.11.49985.112-20}
\elib{https://elibrary.ru/item.asp?id=44588724}
\transl
\jour Tech. Phys.
\yr 2020
\vol 65
\issue 11
\pages 1837--1845
\crossref{https://doi.org/10.1134/S1063784220110274}
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    • This publication is cited in the following 3 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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